JPH03109028U - - Google Patents
Info
- Publication number
- JPH03109028U JPH03109028U JP1526390U JP1526390U JPH03109028U JP H03109028 U JPH03109028 U JP H03109028U JP 1526390 U JP1526390 U JP 1526390U JP 1526390 U JP1526390 U JP 1526390U JP H03109028 U JPH03109028 U JP H03109028U
- Authority
- JP
- Japan
- Prior art keywords
- center
- hard carbon
- carbon film
- substrate
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910021385 hard carbon Inorganic materials 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000006096 absorbing agent Substances 0.000 claims 1
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1526390U JPH0750679Y2 (ja) | 1990-02-20 | 1990-02-20 | サーモパイル型赤外線センサ |
| DE4102524A DE4102524C2 (de) | 1990-01-30 | 1991-01-29 | Infrarotsensor |
| US07/648,134 US5056929A (en) | 1990-01-30 | 1991-01-30 | Temperature compensation type infrared sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1526390U JPH0750679Y2 (ja) | 1990-02-20 | 1990-02-20 | サーモパイル型赤外線センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03109028U true JPH03109028U (no) | 1991-11-08 |
| JPH0750679Y2 JPH0750679Y2 (ja) | 1995-11-15 |
Family
ID=31518581
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1526390U Expired - Lifetime JPH0750679Y2 (ja) | 1990-01-30 | 1990-02-20 | サーモパイル型赤外線センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0750679Y2 (no) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009192350A (ja) * | 2008-02-14 | 2009-08-27 | Nec Corp | 熱型赤外線検出器及びその製造方法 |
| WO2011136203A1 (ja) * | 2010-04-26 | 2011-11-03 | 株式会社エッチ．エム．イー． | 温度センサ素子及びこれを用いた放射温度計、並びに温度センサ素子の製造方法と、フォトレジスト膜を用いた多重層薄膜サーモパイル及びこれを用いた放射温度計、並びに多重層薄膜サーモパイルの製造方法 |
-
1990
- 1990-02-20 JP JP1526390U patent/JPH0750679Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009192350A (ja) * | 2008-02-14 | 2009-08-27 | Nec Corp | 熱型赤外線検出器及びその製造方法 |
| WO2011136203A1 (ja) * | 2010-04-26 | 2011-11-03 | 株式会社エッチ．エム．イー． | 温度センサ素子及びこれを用いた放射温度計、並びに温度センサ素子の製造方法と、フォトレジスト膜を用いた多重層薄膜サーモパイル及びこれを用いた放射温度計、並びに多重層薄膜サーモパイルの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0750679Y2 (ja) | 1995-11-15 |