JPH0746347Y2 - 薬品処理装置 - Google Patents

薬品処理装置

Info

Publication number
JPH0746347Y2
JPH0746347Y2 JP11190387U JP11190387U JPH0746347Y2 JP H0746347 Y2 JPH0746347 Y2 JP H0746347Y2 JP 11190387 U JP11190387 U JP 11190387U JP 11190387 U JP11190387 U JP 11190387U JP H0746347 Y2 JPH0746347 Y2 JP H0746347Y2
Authority
JP
Japan
Prior art keywords
tank
chemical
processing
flow rate
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11190387U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6351638U (cs
Inventor
晃 町田
一男 浅野
隆 佐藤
幹雄 藤井
秀樹 宮地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11190387U priority Critical patent/JPH0746347Y2/ja
Publication of JPS6351638U publication Critical patent/JPS6351638U/ja
Application granted granted Critical
Publication of JPH0746347Y2 publication Critical patent/JPH0746347Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Weting (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP11190387U 1987-07-23 1987-07-23 薬品処理装置 Expired - Lifetime JPH0746347Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11190387U JPH0746347Y2 (ja) 1987-07-23 1987-07-23 薬品処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11190387U JPH0746347Y2 (ja) 1987-07-23 1987-07-23 薬品処理装置

Publications (2)

Publication Number Publication Date
JPS6351638U JPS6351638U (cs) 1988-04-07
JPH0746347Y2 true JPH0746347Y2 (ja) 1995-10-25

Family

ID=30992271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11190387U Expired - Lifetime JPH0746347Y2 (ja) 1987-07-23 1987-07-23 薬品処理装置

Country Status (1)

Country Link
JP (1) JPH0746347Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120049119A (ko) * 2010-11-04 2012-05-16 도쿄엘렉트론가부시키가이샤 액체 유량 제어 장치, 액체 유량 제어 방법, 및 기억 매체

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120049119A (ko) * 2010-11-04 2012-05-16 도쿄엘렉트론가부시키가이샤 액체 유량 제어 장치, 액체 유량 제어 방법, 및 기억 매체

Also Published As

Publication number Publication date
JPS6351638U (cs) 1988-04-07

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