JPH07435Y2 - 真空処理炉の搬送装置 - Google Patents

真空処理炉の搬送装置

Info

Publication number
JPH07435Y2
JPH07435Y2 JP1988131726U JP13172688U JPH07435Y2 JP H07435 Y2 JPH07435 Y2 JP H07435Y2 JP 1988131726 U JP1988131726 U JP 1988131726U JP 13172688 U JP13172688 U JP 13172688U JP H07435 Y2 JPH07435 Y2 JP H07435Y2
Authority
JP
Japan
Prior art keywords
carrier
vacuum processing
processing furnace
transfer
vertical base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988131726U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0252829U (xx
Inventor
善之 三橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP1988131726U priority Critical patent/JPH07435Y2/ja
Publication of JPH0252829U publication Critical patent/JPH0252829U/ja
Application granted granted Critical
Publication of JPH07435Y2 publication Critical patent/JPH07435Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
  • Framework For Endless Conveyors (AREA)
JP1988131726U 1988-10-11 1988-10-11 真空処理炉の搬送装置 Expired - Lifetime JPH07435Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988131726U JPH07435Y2 (ja) 1988-10-11 1988-10-11 真空処理炉の搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988131726U JPH07435Y2 (ja) 1988-10-11 1988-10-11 真空処理炉の搬送装置

Publications (2)

Publication Number Publication Date
JPH0252829U JPH0252829U (xx) 1990-04-17
JPH07435Y2 true JPH07435Y2 (ja) 1995-01-11

Family

ID=31388059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988131726U Expired - Lifetime JPH07435Y2 (ja) 1988-10-11 1988-10-11 真空処理炉の搬送装置

Country Status (1)

Country Link
JP (1) JPH07435Y2 (xx)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101409524B1 (ko) * 2007-05-28 2014-06-20 엘지디스플레이 주식회사 기판 이송 장치
JP2019533896A (ja) * 2017-09-15 2019-11-21 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ キャリア浮揚システムの整列を判断する方法

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1020633C2 (nl) * 2002-05-21 2003-11-24 Otb Group Bv Samenstel voor het behandelen van substraten.
EP1840242B1 (de) * 2006-03-29 2011-06-29 Applied Materials GmbH & Co. KG Vakuumtransportvorrichtung mit beweglicher Führungsschiene
JP2007269071A (ja) * 2006-03-30 2007-10-18 Asyst Shinko Inc 無人搬送装置
KR100880877B1 (ko) * 2007-11-02 2009-01-30 한국기계연구원 자기부상형 기판 이송장치
WO2010026733A1 (ja) * 2008-09-05 2010-03-11 キヤノンアネルバ株式会社 基板搬送装置及び真空成膜装置
JP4745447B2 (ja) * 2010-02-04 2011-08-10 キヤノンアネルバ株式会社 基板搬送装置及び真空処理装置
KR101271112B1 (ko) * 2011-02-01 2013-06-04 (주)이루자 진공 처리 장치
KR101353527B1 (ko) * 2011-09-16 2014-01-21 주식회사 에스에프에이 기판 이송장치
WO2019037873A1 (en) * 2017-08-25 2019-02-28 Applied Materials, Inc. LIFTING OR LOWERING ASSEMBLY OF A SUPPORT, APPARATUS FOR TRANSPORTING A SUPPORT IN A VACUUM CHAMBER, AND METHOD OF LIFTING OR LOWERING A SUPPORT

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5632413U (xx) * 1979-08-20 1981-03-30
JPH0756563Y2 (ja) * 1986-09-09 1995-12-25 株式会社ダイフク リニアモ−タ利用の搬送設備
JPS63185712A (ja) * 1987-01-28 1988-08-01 Nippon Soken Inc 真空蒸着装置の搬送機構

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101409524B1 (ko) * 2007-05-28 2014-06-20 엘지디스플레이 주식회사 기판 이송 장치
JP2019533896A (ja) * 2017-09-15 2019-11-21 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ キャリア浮揚システムの整列を判断する方法

Also Published As

Publication number Publication date
JPH0252829U (xx) 1990-04-17

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