JPH0740524Y2 - 連続成膜方式の真空蒸着装置 - Google Patents

連続成膜方式の真空蒸着装置

Info

Publication number
JPH0740524Y2
JPH0740524Y2 JP1990099646U JP9964690U JPH0740524Y2 JP H0740524 Y2 JPH0740524 Y2 JP H0740524Y2 JP 1990099646 U JP1990099646 U JP 1990099646U JP 9964690 U JP9964690 U JP 9964690U JP H0740524 Y2 JPH0740524 Y2 JP H0740524Y2
Authority
JP
Japan
Prior art keywords
substrate holder
vapor deposition
hook
tank
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990099646U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0456750U (enrdf_load_stackoverflow
Inventor
佳央 中村
庸宏 土師
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinmaywa Industries Ltd
Original Assignee
Shinmaywa Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinmaywa Industries Ltd filed Critical Shinmaywa Industries Ltd
Priority to JP1990099646U priority Critical patent/JPH0740524Y2/ja
Publication of JPH0456750U publication Critical patent/JPH0456750U/ja
Application granted granted Critical
Publication of JPH0740524Y2 publication Critical patent/JPH0740524Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1990099646U 1990-09-20 1990-09-20 連続成膜方式の真空蒸着装置 Expired - Lifetime JPH0740524Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990099646U JPH0740524Y2 (ja) 1990-09-20 1990-09-20 連続成膜方式の真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990099646U JPH0740524Y2 (ja) 1990-09-20 1990-09-20 連続成膜方式の真空蒸着装置

Publications (2)

Publication Number Publication Date
JPH0456750U JPH0456750U (enrdf_load_stackoverflow) 1992-05-15
JPH0740524Y2 true JPH0740524Y2 (ja) 1995-09-20

Family

ID=31841718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990099646U Expired - Lifetime JPH0740524Y2 (ja) 1990-09-20 1990-09-20 連続成膜方式の真空蒸着装置

Country Status (1)

Country Link
JP (1) JPH0740524Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3001961U (ja) * 1994-03-14 1994-09-06 鈴木合金株式会社 段差走行輪を備えた車椅子、老人用走行車、運搬台車等の走行車

Also Published As

Publication number Publication date
JPH0456750U (enrdf_load_stackoverflow) 1992-05-15

Similar Documents

Publication Publication Date Title
TWI706051B (zh) 用於基板載入之方法與裝備
JP4335908B2 (ja) 縦型熱処理装置及び縦型熱処理方法
RU2009131761A (ru) Система и способ нанесения полупроводникового покрытия на лист стекла и получаемый продукт
JPH0740524Y2 (ja) 連続成膜方式の真空蒸着装置
JP2020063465A (ja) 成膜装置、製造システム、有機ｅｌパネルの製造システム、及び成膜方法
JPS6139729B2 (enrdf_load_stackoverflow)
JP2000018832A (ja) 熱処理装置
JP2004332117A (ja) スパッタリング方法、基板保持装置、スパッタリング装置
JP3648589B2 (ja) 熱処理装置
JPH0719149Y2 (ja) 二重フオーク横型搬送装置
CN102234768B (zh) 溅镀装置
JPH05271935A (ja) 連続成膜用真空蒸着装置
JPH10280144A (ja) 排気可能な処理室用のローディング／アンローディング法並びに該方法を実施する装置
JP2000237672A (ja) 基板塗布装置
JP3580916B2 (ja) 基板加熱装置
JPH051378A (ja) インライン成膜装置における基板ホルダの搬送装置
JP3608065B2 (ja) 縦型熱処理装置およびそのボートと保温筒のメンテナンス方法
JPH04202777A (ja) 連続成膜方式の真空蒸着装置
JP4289839B2 (ja) 真空成膜装置
JPH0610679Y2 (ja) 連続インライン式成膜装置
JPH03197674A (ja) 連続真空薄膜形成方法
TW558734B (en) Substrate processing apparatus
JP2000018829A (ja) 炉内への被処理物の搬入出方法および熱処理装置
JP2023036150A (ja) 真空処理装置
JPH07268671A (ja) 洗浄装置

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term