JPH0456750U - - Google Patents

Info

Publication number
JPH0456750U
JPH0456750U JP9964690U JP9964690U JPH0456750U JP H0456750 U JPH0456750 U JP H0456750U JP 9964690 U JP9964690 U JP 9964690U JP 9964690 U JP9964690 U JP 9964690U JP H0456750 U JPH0456750 U JP H0456750U
Authority
JP
Japan
Prior art keywords
substrate holder
tank
rotation mechanism
evaporation apparatus
vacuum evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9964690U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0740524Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990099646U priority Critical patent/JPH0740524Y2/ja
Publication of JPH0456750U publication Critical patent/JPH0456750U/ja
Application granted granted Critical
Publication of JPH0740524Y2 publication Critical patent/JPH0740524Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1990099646U 1990-09-20 1990-09-20 連続成膜方式の真空蒸着装置 Expired - Lifetime JPH0740524Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990099646U JPH0740524Y2 (ja) 1990-09-20 1990-09-20 連続成膜方式の真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990099646U JPH0740524Y2 (ja) 1990-09-20 1990-09-20 連続成膜方式の真空蒸着装置

Publications (2)

Publication Number Publication Date
JPH0456750U true JPH0456750U (enrdf_load_stackoverflow) 1992-05-15
JPH0740524Y2 JPH0740524Y2 (ja) 1995-09-20

Family

ID=31841718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990099646U Expired - Lifetime JPH0740524Y2 (ja) 1990-09-20 1990-09-20 連続成膜方式の真空蒸着装置

Country Status (1)

Country Link
JP (1) JPH0740524Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3001961U (ja) * 1994-03-14 1994-09-06 鈴木合金株式会社 段差走行輪を備えた車椅子、老人用走行車、運搬台車等の走行車

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3001961U (ja) * 1994-03-14 1994-09-06 鈴木合金株式会社 段差走行輪を備えた車椅子、老人用走行車、運搬台車等の走行車

Also Published As

Publication number Publication date
JPH0740524Y2 (ja) 1995-09-20

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term