JPH0456750U - - Google Patents
Info
- Publication number
- JPH0456750U JPH0456750U JP9964690U JP9964690U JPH0456750U JP H0456750 U JPH0456750 U JP H0456750U JP 9964690 U JP9964690 U JP 9964690U JP 9964690 U JP9964690 U JP 9964690U JP H0456750 U JPH0456750 U JP H0456750U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- tank
- rotation mechanism
- evaporation apparatus
- vacuum evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims 2
- 230000008020 evaporation Effects 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 1
- 239000000725 suspension Substances 0.000 claims 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990099646U JPH0740524Y2 (ja) | 1990-09-20 | 1990-09-20 | 連続成膜方式の真空蒸着装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990099646U JPH0740524Y2 (ja) | 1990-09-20 | 1990-09-20 | 連続成膜方式の真空蒸着装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0456750U true JPH0456750U (enrdf_load_stackoverflow) | 1992-05-15 |
JPH0740524Y2 JPH0740524Y2 (ja) | 1995-09-20 |
Family
ID=31841718
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990099646U Expired - Lifetime JPH0740524Y2 (ja) | 1990-09-20 | 1990-09-20 | 連続成膜方式の真空蒸着装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0740524Y2 (enrdf_load_stackoverflow) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3001961U (ja) * | 1994-03-14 | 1994-09-06 | 鈴木合金株式会社 | 段差走行輪を備えた車椅子、老人用走行車、運搬台車等の走行車 |
-
1990
- 1990-09-20 JP JP1990099646U patent/JPH0740524Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3001961U (ja) * | 1994-03-14 | 1994-09-06 | 鈴木合金株式会社 | 段差走行輪を備えた車椅子、老人用走行車、運搬台車等の走行車 |
Also Published As
Publication number | Publication date |
---|---|
JPH0740524Y2 (ja) | 1995-09-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0456750U (enrdf_load_stackoverflow) | ||
JP3900229B2 (ja) | 基板搬送用ハンド | |
JPH10203516A (ja) | 開袋装置 | |
JPH05271935A (ja) | 連続成膜用真空蒸着装置 | |
JPS63108630U (enrdf_load_stackoverflow) | ||
JPH02132657U (enrdf_load_stackoverflow) | ||
JPS58112425U (ja) | バツグフイルタ−装置用濾筒の取出し装置 | |
JPH0669317A (ja) | 搬送用ロボット | |
JP2532345Y2 (ja) | キャスク移送装置 | |
JPH01157166U (enrdf_load_stackoverflow) | ||
JPS5817027Y2 (ja) | コンテナ吊り装置 | |
JPH02122540A (ja) | ウェハ容器搬送用治具 | |
JPH024064Y2 (enrdf_load_stackoverflow) | ||
JPH0638017Y2 (ja) | 刷版の移載装置 | |
JPS6280334U (enrdf_load_stackoverflow) | ||
JPS63147811U (enrdf_load_stackoverflow) | ||
JPS5822660Y2 (ja) | 小魚自動ボイル装置 | |
JPS61145029A (ja) | プリント基板用ハンガ− | |
JPH0213386Y2 (enrdf_load_stackoverflow) | ||
JPH049681U (enrdf_load_stackoverflow) | ||
JPH0192264U (enrdf_load_stackoverflow) | ||
JPS6439632U (enrdf_load_stackoverflow) | ||
JPH0284324U (enrdf_load_stackoverflow) | ||
JPH0630371B2 (ja) | クリーンルーム内のウエハキャリアの搬送方法 | |
JPH0482925U (enrdf_load_stackoverflow) |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |