JPS6280334U - - Google Patents

Info

Publication number
JPS6280334U
JPS6280334U JP17094585U JP17094585U JPS6280334U JP S6280334 U JPS6280334 U JP S6280334U JP 17094585 U JP17094585 U JP 17094585U JP 17094585 U JP17094585 U JP 17094585U JP S6280334 U JPS6280334 U JP S6280334U
Authority
JP
Japan
Prior art keywords
carrier
wafer carrier
rotated
processing device
certain angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17094585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17094585U priority Critical patent/JPS6280334U/ja
Publication of JPS6280334U publication Critical patent/JPS6280334U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Specific Conveyance Elements (AREA)
JP17094585U 1985-11-08 1985-11-08 Pending JPS6280334U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17094585U JPS6280334U (enrdf_load_stackoverflow) 1985-11-08 1985-11-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17094585U JPS6280334U (enrdf_load_stackoverflow) 1985-11-08 1985-11-08

Publications (1)

Publication Number Publication Date
JPS6280334U true JPS6280334U (enrdf_load_stackoverflow) 1987-05-22

Family

ID=31106126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17094585U Pending JPS6280334U (enrdf_load_stackoverflow) 1985-11-08 1985-11-08

Country Status (1)

Country Link
JP (1) JPS6280334U (enrdf_load_stackoverflow)

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