JPS6213921U - - Google Patents

Info

Publication number
JPS6213921U
JPS6213921U JP10484085U JP10484085U JPS6213921U JP S6213921 U JPS6213921 U JP S6213921U JP 10484085 U JP10484085 U JP 10484085U JP 10484085 U JP10484085 U JP 10484085U JP S6213921 U JPS6213921 U JP S6213921U
Authority
JP
Japan
Prior art keywords
wafer carrier
automatic
transfer
manufacturing
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10484085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10484085U priority Critical patent/JPS6213921U/ja
Publication of JPS6213921U publication Critical patent/JPS6213921U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Specific Conveyance Elements (AREA)
  • Ventilation (AREA)
JP10484085U 1985-07-11 1985-07-11 Pending JPS6213921U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10484085U JPS6213921U (enrdf_load_stackoverflow) 1985-07-11 1985-07-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10484085U JPS6213921U (enrdf_load_stackoverflow) 1985-07-11 1985-07-11

Publications (1)

Publication Number Publication Date
JPS6213921U true JPS6213921U (enrdf_load_stackoverflow) 1987-01-28

Family

ID=30978705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10484085U Pending JPS6213921U (enrdf_load_stackoverflow) 1985-07-11 1985-07-11

Country Status (1)

Country Link
JP (1) JPS6213921U (enrdf_load_stackoverflow)

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