JPH0740175Y2 - 流量制御装置 - Google Patents

流量制御装置

Info

Publication number
JPH0740175Y2
JPH0740175Y2 JP1989025777U JP2577789U JPH0740175Y2 JP H0740175 Y2 JPH0740175 Y2 JP H0740175Y2 JP 1989025777 U JP1989025777 U JP 1989025777U JP 2577789 U JP2577789 U JP 2577789U JP H0740175 Y2 JPH0740175 Y2 JP H0740175Y2
Authority
JP
Japan
Prior art keywords
fluid
block
pressure
flow rate
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1989025777U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02118226U (US20090163788A1-20090625-C00002.png
Inventor
薫 西村
渉 小川
泰能 太田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1989025777U priority Critical patent/JPH0740175Y2/ja
Publication of JPH02118226U publication Critical patent/JPH02118226U/ja
Application granted granted Critical
Publication of JPH0740175Y2 publication Critical patent/JPH0740175Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
JP1989025777U 1989-03-07 1989-03-07 流量制御装置 Expired - Fee Related JPH0740175Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989025777U JPH0740175Y2 (ja) 1989-03-07 1989-03-07 流量制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989025777U JPH0740175Y2 (ja) 1989-03-07 1989-03-07 流量制御装置

Publications (2)

Publication Number Publication Date
JPH02118226U JPH02118226U (US20090163788A1-20090625-C00002.png) 1990-09-21
JPH0740175Y2 true JPH0740175Y2 (ja) 1995-09-13

Family

ID=31246809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989025777U Expired - Fee Related JPH0740175Y2 (ja) 1989-03-07 1989-03-07 流量制御装置

Country Status (1)

Country Link
JP (1) JPH0740175Y2 (US20090163788A1-20090625-C00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007086394A1 (ja) * 2006-01-24 2007-08-02 Fujikin Incorporated 圧力センサ装置および圧力センサ内蔵流体制御機器

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3604059B2 (ja) * 1998-07-17 2004-12-22 株式会社堀場製作所 部分希釈方式のガス希釈システム
JP2011248773A (ja) * 2010-05-28 2011-12-08 Horiba Ltd 流量比率制御装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5992313A (ja) * 1982-11-18 1984-05-28 Kansai Electric Power Co Inc:The 流量検出装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6062117U (ja) * 1983-10-04 1985-05-01 株式会社　京浜精機製作所 流量制御弁

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5992313A (ja) * 1982-11-18 1984-05-28 Kansai Electric Power Co Inc:The 流量検出装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007086394A1 (ja) * 2006-01-24 2007-08-02 Fujikin Incorporated 圧力センサ装置および圧力センサ内蔵流体制御機器
JP2007198788A (ja) * 2006-01-24 2007-08-09 Fujikin Inc 圧力センサ装置および圧力センサ内蔵流体制御機器

Also Published As

Publication number Publication date
JPH02118226U (US20090163788A1-20090625-C00002.png) 1990-09-21

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