JPH0734011Y2 - 移動成膜装置 - Google Patents

移動成膜装置

Info

Publication number
JPH0734011Y2
JPH0734011Y2 JP1989038751U JP3875189U JPH0734011Y2 JP H0734011 Y2 JPH0734011 Y2 JP H0734011Y2 JP 1989038751 U JP1989038751 U JP 1989038751U JP 3875189 U JP3875189 U JP 3875189U JP H0734011 Y2 JPH0734011 Y2 JP H0734011Y2
Authority
JP
Japan
Prior art keywords
chamber
gear
substrate
driving force
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989038751U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02129349U (enrdf_load_stackoverflow
Inventor
正義 今村
佳興 横山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1989038751U priority Critical patent/JPH0734011Y2/ja
Publication of JPH02129349U publication Critical patent/JPH02129349U/ja
Application granted granted Critical
Publication of JPH0734011Y2 publication Critical patent/JPH0734011Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Intermediate Stations On Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Branching, Merging, And Special Transfer Between Conveyors (AREA)
JP1989038751U 1989-03-31 1989-03-31 移動成膜装置 Expired - Lifetime JPH0734011Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989038751U JPH0734011Y2 (ja) 1989-03-31 1989-03-31 移動成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989038751U JPH0734011Y2 (ja) 1989-03-31 1989-03-31 移動成膜装置

Publications (2)

Publication Number Publication Date
JPH02129349U JPH02129349U (enrdf_load_stackoverflow) 1990-10-25
JPH0734011Y2 true JPH0734011Y2 (ja) 1995-08-02

Family

ID=31547042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989038751U Expired - Lifetime JPH0734011Y2 (ja) 1989-03-31 1989-03-31 移動成膜装置

Country Status (1)

Country Link
JP (1) JPH0734011Y2 (enrdf_load_stackoverflow)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS617104A (ja) * 1984-06-21 1986-01-13 Honda Motor Co Ltd 格納装置
JPH0313441Y2 (enrdf_load_stackoverflow) * 1984-12-10 1991-03-27
JPS63185712A (ja) * 1987-01-28 1988-08-01 Nippon Soken Inc 真空蒸着装置の搬送機構
JPS63300009A (ja) * 1987-05-28 1988-12-07 Semiconductor Energy Lab Co Ltd 基板搬送機構

Also Published As

Publication number Publication date
JPH02129349U (enrdf_load_stackoverflow) 1990-10-25

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