JPH073311Y2 - 半導体差圧測定装置 - Google Patents
半導体差圧測定装置Info
- Publication number
- JPH073311Y2 JPH073311Y2 JP14041588U JP14041588U JPH073311Y2 JP H073311 Y2 JPH073311 Y2 JP H073311Y2 JP 14041588 U JP14041588 U JP 14041588U JP 14041588 U JP14041588 U JP 14041588U JP H073311 Y2 JPH073311 Y2 JP H073311Y2
- Authority
- JP
- Japan
- Prior art keywords
- sensor chip
- semiconductor
- diaphragm
- liquid contact
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14041588U JPH073311Y2 (ja) | 1988-10-27 | 1988-10-27 | 半導体差圧測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14041588U JPH073311Y2 (ja) | 1988-10-27 | 1988-10-27 | 半導体差圧測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0260838U JPH0260838U (no) | 1990-05-07 |
JPH073311Y2 true JPH073311Y2 (ja) | 1995-01-30 |
Family
ID=31404562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14041588U Expired - Lifetime JPH073311Y2 (ja) | 1988-10-27 | 1988-10-27 | 半導体差圧測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH073311Y2 (no) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016003994A (ja) * | 2014-06-18 | 2016-01-12 | セイコーエプソン株式会社 | 物理量センサー、高度計、電子機器および移動体 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005027365A1 (de) * | 2005-06-14 | 2006-12-21 | Robert Bosch Gmbh | Hochdrucksensoreinrichtung und Verfahren zu ihrer Herstellung |
DE102008021091A1 (de) * | 2008-04-28 | 2009-10-29 | Epcos Ag | Drucksensor |
-
1988
- 1988-10-27 JP JP14041588U patent/JPH073311Y2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016003994A (ja) * | 2014-06-18 | 2016-01-12 | セイコーエプソン株式会社 | 物理量センサー、高度計、電子機器および移動体 |
Also Published As
Publication number | Publication date |
---|---|
JPH0260838U (no) | 1990-05-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5937716Y2 (ja) | 半導体差圧センサ | |
US4023562A (en) | Miniature pressure transducer for medical use and assembly method | |
JPS6153876B2 (no) | ||
US6186009B1 (en) | Semiconductor pressure sensor for sensing fluid pressure | |
JPH04320938A (ja) | 差圧センサ、及び複合機能形差圧センサ | |
CN111638002A (zh) | 一种mems压力传感器充油芯体及其封装方法 | |
US4809555A (en) | Pressure sensor | |
US4498070A (en) | Semi-conductor transducer and method of making the same | |
JPH073311Y2 (ja) | 半導体差圧測定装置 | |
US5279164A (en) | Semiconductor pressure sensor with improved temperature compensation | |
JPH01169333A (ja) | 半導体圧力変換器 | |
CN112903176A (zh) | 基于封装基板的阵列式压力测量装置 | |
JPH02196938A (ja) | 圧力センサ | |
JPH1194673A (ja) | センサおよびセンサの製造方法 | |
JP3307275B2 (ja) | 半導体圧力センサ | |
CN214251349U (zh) | 基于封装基板的阵列式压力测量装置 | |
JP3158354B2 (ja) | 圧力検出装置 | |
JPH1168120A (ja) | 半導体圧力センサ及びその製造方法 | |
JPH0245721A (ja) | 絶対圧型半導体圧力センサ | |
JP3627036B2 (ja) | 半導体圧力センサ | |
JP3375533B2 (ja) | 半導体圧力変換器 | |
JPS59174728A (ja) | 半導体式圧力センサ | |
JP2735107B2 (ja) | 半導体圧力センサ | |
JPH04350530A (ja) | 半導体圧力センサ | |
JP3307274B2 (ja) | 半導体圧力センサ |