JPH0260838U - - Google Patents
Info
- Publication number
- JPH0260838U JPH0260838U JP14041588U JP14041588U JPH0260838U JP H0260838 U JPH0260838 U JP H0260838U JP 14041588 U JP14041588 U JP 14041588U JP 14041588 U JP14041588 U JP 14041588U JP H0260838 U JPH0260838 U JP H0260838U
- Authority
- JP
- Japan
- Prior art keywords
- sensor chip
- chamber
- recess
- liquid contact
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14041588U JPH073311Y2 (ja) | 1988-10-27 | 1988-10-27 | 半導体差圧測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14041588U JPH073311Y2 (ja) | 1988-10-27 | 1988-10-27 | 半導体差圧測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0260838U true JPH0260838U (no) | 1990-05-07 |
| JPH073311Y2 JPH073311Y2 (ja) | 1995-01-30 |
Family
ID=31404562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14041588U Expired - Lifetime JPH073311Y2 (ja) | 1988-10-27 | 1988-10-27 | 半導体差圧測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH073311Y2 (no) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006349682A (ja) * | 2005-06-14 | 2006-12-28 | Robert Bosch Gmbh | 高圧センサ装置および該高圧センサ装置を製作するための方法 |
| JP2014160084A (ja) * | 2008-04-28 | 2014-09-04 | Epcos Ag | 圧力センサ |
| JP2016003994A (ja) * | 2014-06-18 | 2016-01-12 | セイコーエプソン株式会社 | 物理量センサー、高度計、電子機器および移動体 |
-
1988
- 1988-10-27 JP JP14041588U patent/JPH073311Y2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006349682A (ja) * | 2005-06-14 | 2006-12-28 | Robert Bosch Gmbh | 高圧センサ装置および該高圧センサ装置を製作するための方法 |
| JP2014160084A (ja) * | 2008-04-28 | 2014-09-04 | Epcos Ag | 圧力センサ |
| JP2016003994A (ja) * | 2014-06-18 | 2016-01-12 | セイコーエプソン株式会社 | 物理量センサー、高度計、電子機器および移動体 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH073311Y2 (ja) | 1995-01-30 |