JPH073309Y2 - 一体形差圧センサ - Google Patents

一体形差圧センサ

Info

Publication number
JPH073309Y2
JPH073309Y2 JP13242188U JP13242188U JPH073309Y2 JP H073309 Y2 JPH073309 Y2 JP H073309Y2 JP 13242188 U JP13242188 U JP 13242188U JP 13242188 U JP13242188 U JP 13242188U JP H073309 Y2 JPH073309 Y2 JP H073309Y2
Authority
JP
Japan
Prior art keywords
silicon chip
substrate
measurement
diaphragm
measurement chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13242188U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0252139U (cs
Inventor
佐一郎 森田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP13242188U priority Critical patent/JPH073309Y2/ja
Publication of JPH0252139U publication Critical patent/JPH0252139U/ja
Application granted granted Critical
Publication of JPH073309Y2 publication Critical patent/JPH073309Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Measuring Fluid Pressure (AREA)
JP13242188U 1988-10-11 1988-10-11 一体形差圧センサ Expired - Lifetime JPH073309Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13242188U JPH073309Y2 (ja) 1988-10-11 1988-10-11 一体形差圧センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13242188U JPH073309Y2 (ja) 1988-10-11 1988-10-11 一体形差圧センサ

Publications (2)

Publication Number Publication Date
JPH0252139U JPH0252139U (cs) 1990-04-13
JPH073309Y2 true JPH073309Y2 (ja) 1995-01-30

Family

ID=31389366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13242188U Expired - Lifetime JPH073309Y2 (ja) 1988-10-11 1988-10-11 一体形差圧センサ

Country Status (1)

Country Link
JP (1) JPH073309Y2 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4570149B2 (ja) * 2005-04-05 2010-10-27 株式会社デンソー 気体密度比検出装置、濃度検出装置及び燃料蒸気処理装置

Also Published As

Publication number Publication date
JPH0252139U (cs) 1990-04-13

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