JPH0732956Y2 - タ−ボ分子ポンプ - Google Patents

タ−ボ分子ポンプ

Info

Publication number
JPH0732956Y2
JPH0732956Y2 JP1987123974U JP12397487U JPH0732956Y2 JP H0732956 Y2 JPH0732956 Y2 JP H0732956Y2 JP 1987123974 U JP1987123974 U JP 1987123974U JP 12397487 U JP12397487 U JP 12397487U JP H0732956 Y2 JPH0732956 Y2 JP H0732956Y2
Authority
JP
Japan
Prior art keywords
rotor
molecular pump
room
turbo molecular
emissivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987123974U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6429290U (OSRAM
Inventor
博文 小高
Original Assignee
セイコー精機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコー精機株式会社 filed Critical セイコー精機株式会社
Priority to JP1987123974U priority Critical patent/JPH0732956Y2/ja
Publication of JPS6429290U publication Critical patent/JPS6429290U/ja
Application granted granted Critical
Publication of JPH0732956Y2 publication Critical patent/JPH0732956Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP1987123974U 1987-08-13 1987-08-13 タ−ボ分子ポンプ Expired - Lifetime JPH0732956Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987123974U JPH0732956Y2 (ja) 1987-08-13 1987-08-13 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987123974U JPH0732956Y2 (ja) 1987-08-13 1987-08-13 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS6429290U JPS6429290U (OSRAM) 1989-02-21
JPH0732956Y2 true JPH0732956Y2 (ja) 1995-07-31

Family

ID=31373310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987123974U Expired - Lifetime JPH0732956Y2 (ja) 1987-08-13 1987-08-13 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPH0732956Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005116448A1 (ja) * 2004-05-25 2005-12-08 Boc Edwards Japan Limited 真空ポンプ

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10024327B2 (en) 2009-08-26 2018-07-17 Shimadzu Corporation Turbomolecular pump, and method of manufacturing rotor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS584323A (ja) * 1981-06-26 1983-01-11 Osaka Shinku Kiki Seisakusho:Kk 動翼付ロ−タ−の成形法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005116448A1 (ja) * 2004-05-25 2005-12-08 Boc Edwards Japan Limited 真空ポンプ

Also Published As

Publication number Publication date
JPS6429290U (OSRAM) 1989-02-21

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