JPH0731544Y2 - ウエハカセツトの移載装置 - Google Patents
ウエハカセツトの移載装置Info
- Publication number
- JPH0731544Y2 JPH0731544Y2 JP7718589U JP7718589U JPH0731544Y2 JP H0731544 Y2 JPH0731544 Y2 JP H0731544Y2 JP 7718589 U JP7718589 U JP 7718589U JP 7718589 U JP7718589 U JP 7718589U JP H0731544 Y2 JPH0731544 Y2 JP H0731544Y2
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- fixed
- cassette
- rotating
- planetary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000012546 transfer Methods 0.000 title claims description 23
- 230000007246 mechanism Effects 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 9
- 230000003028 elevating effect Effects 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 43
- 238000012545 processing Methods 0.000 description 10
- 210000000078 claw Anatomy 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 3
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Landscapes
- Transmission Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7718589U JPH0731544Y2 (ja) | 1989-06-29 | 1989-06-29 | ウエハカセツトの移載装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7718589U JPH0731544Y2 (ja) | 1989-06-29 | 1989-06-29 | ウエハカセツトの移載装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0316340U JPH0316340U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-02-19 |
| JPH0731544Y2 true JPH0731544Y2 (ja) | 1995-07-19 |
Family
ID=31619335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7718589U Expired - Lifetime JPH0731544Y2 (ja) | 1989-06-29 | 1989-06-29 | ウエハカセツトの移載装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0731544Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003051527A (ja) * | 2001-08-02 | 2003-02-21 | Takehide Hayashi | 半導体自動搬送対応ｅｆｅｍ（密閉容器からウエハーを出し入れし、製造装置に供給、回収する装置）用ｆｏｕｐ（密閉容器）移載ロボット |
| CN115036248B (zh) * | 2022-08-12 | 2022-11-04 | 安徽大华半导体科技有限公司 | 一种防过载芯片推出装置 |
-
1989
- 1989-06-29 JP JP7718589U patent/JPH0731544Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0316340U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-02-19 |