JPH0730693Y2 - シリコン単結晶引上げ用石英ルツボ - Google Patents

シリコン単結晶引上げ用石英ルツボ

Info

Publication number
JPH0730693Y2
JPH0730693Y2 JP1989125066U JP12506689U JPH0730693Y2 JP H0730693 Y2 JPH0730693 Y2 JP H0730693Y2 JP 1989125066 U JP1989125066 U JP 1989125066U JP 12506689 U JP12506689 U JP 12506689U JP H0730693 Y2 JPH0730693 Y2 JP H0730693Y2
Authority
JP
Japan
Prior art keywords
crucible
inclined surface
single crystal
silicon single
quartz crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1989125066U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0363581U (enExample
Inventor
義行 辻
正典 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP1989125066U priority Critical patent/JPH0730693Y2/ja
Publication of JPH0363581U publication Critical patent/JPH0363581U/ja
Application granted granted Critical
Publication of JPH0730693Y2 publication Critical patent/JPH0730693Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1989125066U 1989-10-27 1989-10-27 シリコン単結晶引上げ用石英ルツボ Expired - Fee Related JPH0730693Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989125066U JPH0730693Y2 (ja) 1989-10-27 1989-10-27 シリコン単結晶引上げ用石英ルツボ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989125066U JPH0730693Y2 (ja) 1989-10-27 1989-10-27 シリコン単結晶引上げ用石英ルツボ

Publications (2)

Publication Number Publication Date
JPH0363581U JPH0363581U (enExample) 1991-06-20
JPH0730693Y2 true JPH0730693Y2 (ja) 1995-07-12

Family

ID=31672952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989125066U Expired - Fee Related JPH0730693Y2 (ja) 1989-10-27 1989-10-27 シリコン単結晶引上げ用石英ルツボ

Country Status (1)

Country Link
JP (1) JPH0730693Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008002668A (ja) * 2006-06-26 2008-01-10 Kurabo Ind Ltd 真空断熱材
TW201732222A (zh) * 2015-12-21 2017-09-16 Ｓｕｍｃｏ股份有限公司 氧化矽玻璃坩堝、氧化矽玻璃坩堝的製造方法、單晶矽的提拉裝置、錠及同質外延晶圓

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5345318A (en) * 1976-10-06 1978-04-24 Toshiba Ceramics Co Process and apparatus for preparing glass vessel and the like of high silica content
JPH0616926Y2 (ja) * 1986-02-05 1994-05-02 信越石英株式会社 単結晶引き上げ用石英ガラスルツボ
JPS63319288A (ja) * 1987-06-23 1988-12-27 Shin Etsu Handotai Co Ltd 鍔付石英るつぼ

Also Published As

Publication number Publication date
JPH0363581U (enExample) 1991-06-20

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