JPH0730602Y2 - 基板供給装置 - Google Patents

基板供給装置

Info

Publication number
JPH0730602Y2
JPH0730602Y2 JP1989091013U JP9101389U JPH0730602Y2 JP H0730602 Y2 JPH0730602 Y2 JP H0730602Y2 JP 1989091013 U JP1989091013 U JP 1989091013U JP 9101389 U JP9101389 U JP 9101389U JP H0730602 Y2 JPH0730602 Y2 JP H0730602Y2
Authority
JP
Japan
Prior art keywords
substrate
pushing
supply device
claw
elastic member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1989091013U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0331139U (en, 2012
Inventor
岩実 浦元
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kaijo Corp
Original Assignee
Kaijo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kaijo Corp filed Critical Kaijo Corp
Priority to JP1989091013U priority Critical patent/JPH0730602Y2/ja
Publication of JPH0331139U publication Critical patent/JPH0331139U/ja
Application granted granted Critical
Publication of JPH0730602Y2 publication Critical patent/JPH0730602Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Controlling Sheets Or Webs (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Warehouses Or Storage Devices (AREA)
JP1989091013U 1989-08-03 1989-08-03 基板供給装置 Expired - Fee Related JPH0730602Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989091013U JPH0730602Y2 (ja) 1989-08-03 1989-08-03 基板供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989091013U JPH0730602Y2 (ja) 1989-08-03 1989-08-03 基板供給装置

Publications (2)

Publication Number Publication Date
JPH0331139U JPH0331139U (en, 2012) 1991-03-26
JPH0730602Y2 true JPH0730602Y2 (ja) 1995-07-12

Family

ID=31640517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989091013U Expired - Fee Related JPH0730602Y2 (ja) 1989-08-03 1989-08-03 基板供給装置

Country Status (1)

Country Link
JP (1) JPH0730602Y2 (en, 2012)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6095503U (ja) * 1983-12-07 1985-06-29 パイオニア株式会社 部品供給装置
JPH066115Y2 (ja) * 1987-03-16 1994-02-16 東京エレクトロン株式会社 ウエハ供給装置

Also Published As

Publication number Publication date
JPH0331139U (en, 2012) 1991-03-26

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Legal Events

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LAPS Cancellation because of no payment of annual fees