JPH07297267A - 静電チャック付セラミックスヒーター - Google Patents

静電チャック付セラミックスヒーター

Info

Publication number
JPH07297267A
JPH07297267A JP31639694A JP31639694A JPH07297267A JP H07297267 A JPH07297267 A JP H07297267A JP 31639694 A JP31639694 A JP 31639694A JP 31639694 A JP31639694 A JP 31639694A JP H07297267 A JPH07297267 A JP H07297267A
Authority
JP
Japan
Prior art keywords
electrostatic chuck
linear expansion
coating layer
difference
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31639694A
Other languages
English (en)
Japanese (ja)
Inventor
Atsuo Kawada
敦雄 川田
Toshihiko Shindo
敏彦 進藤
Takaaki Nagao
貴章 長尾
Takeshi Kakegawa
健 掛川
Jiyunichi Arami
淳一 荒見
Kenji Ishikawa
賢治 石川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Tokyo Electron Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Tokyo Electron Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP31639694A priority Critical patent/JPH07297267A/ja
Priority to KR1019940037553A priority patent/KR950021341A/ko
Priority to TW084100159A priority patent/TW289129B/zh
Publication of JPH07297267A publication Critical patent/JPH07297267A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Resistance Heating (AREA)
  • Ceramic Products (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Jigs For Machine Tools (AREA)
JP31639694A 1993-12-27 1994-12-20 静電チャック付セラミックスヒーター Pending JPH07297267A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP31639694A JPH07297267A (ja) 1993-12-27 1994-12-20 静電チャック付セラミックスヒーター
KR1019940037553A KR950021341A (ko) 1993-12-27 1994-12-27 정전척크 부착 세라믹 히터
TW084100159A TW289129B (enExample) 1993-12-27 1995-01-10

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP33087993 1993-12-27
JP5-330879 1993-12-27
JP31639694A JPH07297267A (ja) 1993-12-27 1994-12-20 静電チャック付セラミックスヒーター

Publications (1)

Publication Number Publication Date
JPH07297267A true JPH07297267A (ja) 1995-11-10

Family

ID=26568639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31639694A Pending JPH07297267A (ja) 1993-12-27 1994-12-20 静電チャック付セラミックスヒーター

Country Status (3)

Country Link
JP (1) JPH07297267A (enExample)
KR (1) KR950021341A (enExample)
TW (1) TW289129B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3439427A1 (en) * 2017-07-31 2019-02-06 Samsung Electronics Co., Ltd. Structure, planar heater including the same, heating device including the planar heater, and method of preparing the structure

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100477388B1 (ko) * 2002-08-26 2005-03-17 주성엔지니어링(주) 웨이퍼 공정용 히터블록
DE202011000090U1 (de) 2011-01-14 2011-04-21 E-LEAD ELECTRONIC CO., LTD., Shengang Shiang Fahrzeug-Audiosystem mit auswechselbarem Plug-In-Computer

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03194948A (ja) * 1989-12-22 1991-08-26 Tokyo Electron Ltd 静電チャック
JPH04358074A (ja) * 1991-06-03 1992-12-11 Denki Kagaku Kogyo Kk ホットプレート
JPH0513555A (ja) * 1991-07-01 1993-01-22 Toto Ltd 静電チヤツク及び静電チヤツクに対する電圧印加方法
JPH0513558A (ja) * 1990-12-25 1993-01-22 Ngk Insulators Ltd ウエハー加熱装置及びその製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03194948A (ja) * 1989-12-22 1991-08-26 Tokyo Electron Ltd 静電チャック
JPH0513558A (ja) * 1990-12-25 1993-01-22 Ngk Insulators Ltd ウエハー加熱装置及びその製造方法
JPH04358074A (ja) * 1991-06-03 1992-12-11 Denki Kagaku Kogyo Kk ホットプレート
JPH0513555A (ja) * 1991-07-01 1993-01-22 Toto Ltd 静電チヤツク及び静電チヤツクに対する電圧印加方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3439427A1 (en) * 2017-07-31 2019-02-06 Samsung Electronics Co., Ltd. Structure, planar heater including the same, heating device including the planar heater, and method of preparing the structure
US10917942B2 (en) 2017-07-31 2021-02-09 Samsung Electronics Co., Ltd. Structure, planar heater including the same, heating device including the planar heater, and method of preparing the structure

Also Published As

Publication number Publication date
TW289129B (enExample) 1996-10-21
KR950021341A (ko) 1995-07-26

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