KR950021341A - 정전척크 부착 세라믹 히터 - Google Patents
정전척크 부착 세라믹 히터 Download PDFInfo
- Publication number
- KR950021341A KR950021341A KR1019940037553A KR19940037553A KR950021341A KR 950021341 A KR950021341 A KR 950021341A KR 1019940037553 A KR1019940037553 A KR 1019940037553A KR 19940037553 A KR19940037553 A KR 19940037553A KR 950021341 A KR950021341 A KR 950021341A
- Authority
- KR
- South Korea
- Prior art keywords
- electrostatic chuck
- ceramic
- ceramic heater
- electrode
- coating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 19
- 239000011247 coating layer Substances 0.000 claims abstract 9
- 239000010410 layer Substances 0.000 claims abstract 9
- 229910052582 BN Inorganic materials 0.000 claims 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 2
- 230000004888 barrier function Effects 0.000 claims 2
- 238000009792 diffusion process Methods 0.000 claims 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims 1
- 229910002804 graphite Inorganic materials 0.000 claims 1
- 239000010439 graphite Substances 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000000463 material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Resistance Heating (AREA)
- Ceramic Products (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Jigs For Machine Tools (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33087993 | 1993-12-27 | ||
| JP93-330879 | 1993-12-27 | ||
| JP31639694A JPH07297267A (ja) | 1993-12-27 | 1994-12-20 | 静電チャック付セラミックスヒーター |
| JP94-316396 | 1994-12-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR950021341A true KR950021341A (ko) | 1995-07-26 |
Family
ID=26568639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019940037553A Abandoned KR950021341A (ko) | 1993-12-27 | 1994-12-27 | 정전척크 부착 세라믹 히터 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPH07297267A (enExample) |
| KR (1) | KR950021341A (enExample) |
| TW (1) | TW289129B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100477388B1 (ko) * | 2002-08-26 | 2005-03-17 | 주성엔지니어링(주) | 웨이퍼 공정용 히터블록 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE202011000090U1 (de) | 2011-01-14 | 2011-04-21 | E-LEAD ELECTRONIC CO., LTD., Shengang Shiang | Fahrzeug-Audiosystem mit auswechselbarem Plug-In-Computer |
| US10917942B2 (en) | 2017-07-31 | 2021-02-09 | Samsung Electronics Co., Ltd. | Structure, planar heater including the same, heating device including the planar heater, and method of preparing the structure |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2638649B2 (ja) * | 1989-12-22 | 1997-08-06 | 東京エレクトロン株式会社 | 静電チャック |
| JPH0750736B2 (ja) * | 1990-12-25 | 1995-05-31 | 日本碍子株式会社 | ウエハー加熱装置及びその製造方法 |
| JP3081279B2 (ja) * | 1991-06-03 | 2000-08-28 | 電気化学工業株式会社 | ホットプレート |
| JPH0513555A (ja) * | 1991-07-01 | 1993-01-22 | Toto Ltd | 静電チヤツク及び静電チヤツクに対する電圧印加方法 |
-
1994
- 1994-12-20 JP JP31639694A patent/JPH07297267A/ja active Pending
- 1994-12-27 KR KR1019940037553A patent/KR950021341A/ko not_active Abandoned
-
1995
- 1995-01-10 TW TW084100159A patent/TW289129B/zh not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100477388B1 (ko) * | 2002-08-26 | 2005-03-17 | 주성엔지니어링(주) | 웨이퍼 공정용 히터블록 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07297267A (ja) | 1995-11-10 |
| TW289129B (enExample) | 1996-10-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 19941227 |
|
| PG1501 | Laying open of application | ||
| A201 | Request for examination | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 19970310 Comment text: Request for Examination of Application Patent event code: PA02011R01I Patent event date: 19941227 Comment text: Patent Application |
|
| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 19990831 |
|
| NORF | Unpaid initial registration fee | ||
| PC1904 | Unpaid initial registration fee |