JPH0728691Y2 - 基板搬送装置 - Google Patents

基板搬送装置

Info

Publication number
JPH0728691Y2
JPH0728691Y2 JP1988084277U JP8427788U JPH0728691Y2 JP H0728691 Y2 JPH0728691 Y2 JP H0728691Y2 JP 1988084277 U JP1988084277 U JP 1988084277U JP 8427788 U JP8427788 U JP 8427788U JP H0728691 Y2 JPH0728691 Y2 JP H0728691Y2
Authority
JP
Japan
Prior art keywords
substrate
support plate
positioning member
swivel
transfer device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988084277U
Other languages
English (en)
Japanese (ja)
Other versions
JPH025863U (enrdf_load_stackoverflow
Inventor
真 中沢
恒雄 平松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1988084277U priority Critical patent/JPH0728691Y2/ja
Publication of JPH025863U publication Critical patent/JPH025863U/ja
Application granted granted Critical
Publication of JPH0728691Y2 publication Critical patent/JPH0728691Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988084277U 1988-06-25 1988-06-25 基板搬送装置 Expired - Lifetime JPH0728691Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988084277U JPH0728691Y2 (ja) 1988-06-25 1988-06-25 基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988084277U JPH0728691Y2 (ja) 1988-06-25 1988-06-25 基板搬送装置

Publications (2)

Publication Number Publication Date
JPH025863U JPH025863U (enrdf_load_stackoverflow) 1990-01-16
JPH0728691Y2 true JPH0728691Y2 (ja) 1995-06-28

Family

ID=31308973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988084277U Expired - Lifetime JPH0728691Y2 (ja) 1988-06-25 1988-06-25 基板搬送装置

Country Status (1)

Country Link
JP (1) JPH0728691Y2 (enrdf_load_stackoverflow)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5935505B2 (ja) * 1977-02-07 1984-08-29 日新電機株式会社 半導体装置の製造装置
JPS59170959U (ja) * 1983-05-02 1984-11-15 日新電機株式会社 イオン注入装置
JPS60216543A (ja) * 1984-04-11 1985-10-30 Nissin Electric Co Ltd ウエハのデイスクへの装着機構

Also Published As

Publication number Publication date
JPH025863U (enrdf_load_stackoverflow) 1990-01-16

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