JPH0726839Y2 - 気相成長装置 - Google Patents

気相成長装置

Info

Publication number
JPH0726839Y2
JPH0726839Y2 JP4117885U JP4117885U JPH0726839Y2 JP H0726839 Y2 JPH0726839 Y2 JP H0726839Y2 JP 4117885 U JP4117885 U JP 4117885U JP 4117885 U JP4117885 U JP 4117885U JP H0726839 Y2 JPH0726839 Y2 JP H0726839Y2
Authority
JP
Japan
Prior art keywords
lid
reaction chamber
substrate
phase growth
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4117885U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61157327U (enrdf_load_stackoverflow
Inventor
泰山 後藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP4117885U priority Critical patent/JPH0726839Y2/ja
Publication of JPS61157327U publication Critical patent/JPS61157327U/ja
Application granted granted Critical
Publication of JPH0726839Y2 publication Critical patent/JPH0726839Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP4117885U 1985-03-22 1985-03-22 気相成長装置 Expired - Lifetime JPH0726839Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4117885U JPH0726839Y2 (ja) 1985-03-22 1985-03-22 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4117885U JPH0726839Y2 (ja) 1985-03-22 1985-03-22 気相成長装置

Publications (2)

Publication Number Publication Date
JPS61157327U JPS61157327U (enrdf_load_stackoverflow) 1986-09-30
JPH0726839Y2 true JPH0726839Y2 (ja) 1995-06-14

Family

ID=30550758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4117885U Expired - Lifetime JPH0726839Y2 (ja) 1985-03-22 1985-03-22 気相成長装置

Country Status (1)

Country Link
JP (1) JPH0726839Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS61157327U (enrdf_load_stackoverflow) 1986-09-30

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