JPS61157327U - - Google Patents

Info

Publication number
JPS61157327U
JPS61157327U JP4117885U JP4117885U JPS61157327U JP S61157327 U JPS61157327 U JP S61157327U JP 4117885 U JP4117885 U JP 4117885U JP 4117885 U JP4117885 U JP 4117885U JP S61157327 U JPS61157327 U JP S61157327U
Authority
JP
Japan
Prior art keywords
reaction chamber
substrate support
vapor phase
phase growth
growth apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4117885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0726839Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4117885U priority Critical patent/JPH0726839Y2/ja
Publication of JPS61157327U publication Critical patent/JPS61157327U/ja
Application granted granted Critical
Publication of JPH0726839Y2 publication Critical patent/JPH0726839Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP4117885U 1985-03-22 1985-03-22 気相成長装置 Expired - Lifetime JPH0726839Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4117885U JPH0726839Y2 (ja) 1985-03-22 1985-03-22 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4117885U JPH0726839Y2 (ja) 1985-03-22 1985-03-22 気相成長装置

Publications (2)

Publication Number Publication Date
JPS61157327U true JPS61157327U (enrdf_load_stackoverflow) 1986-09-30
JPH0726839Y2 JPH0726839Y2 (ja) 1995-06-14

Family

ID=30550758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4117885U Expired - Lifetime JPH0726839Y2 (ja) 1985-03-22 1985-03-22 気相成長装置

Country Status (1)

Country Link
JP (1) JPH0726839Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0726839Y2 (ja) 1995-06-14

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