JPH0722852Y2 - イオン注入装置用ビ−ムモニタ - Google Patents

イオン注入装置用ビ−ムモニタ

Info

Publication number
JPH0722852Y2
JPH0722852Y2 JP9209586U JP9209586U JPH0722852Y2 JP H0722852 Y2 JPH0722852 Y2 JP H0722852Y2 JP 9209586 U JP9209586 U JP 9209586U JP 9209586 U JP9209586 U JP 9209586U JP H0722852 Y2 JPH0722852 Y2 JP H0722852Y2
Authority
JP
Japan
Prior art keywords
vertical
horizontal
waveform
display device
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP9209586U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62202767U (enrdf_load_stackoverflow
Inventor
幸平 関根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP9209586U priority Critical patent/JPH0722852Y2/ja
Publication of JPS62202767U publication Critical patent/JPS62202767U/ja
Application granted granted Critical
Publication of JPH0722852Y2 publication Critical patent/JPH0722852Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP9209586U 1986-06-16 1986-06-16 イオン注入装置用ビ−ムモニタ Expired - Lifetime JPH0722852Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9209586U JPH0722852Y2 (ja) 1986-06-16 1986-06-16 イオン注入装置用ビ−ムモニタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9209586U JPH0722852Y2 (ja) 1986-06-16 1986-06-16 イオン注入装置用ビ−ムモニタ

Publications (2)

Publication Number Publication Date
JPS62202767U JPS62202767U (enrdf_load_stackoverflow) 1987-12-24
JPH0722852Y2 true JPH0722852Y2 (ja) 1995-05-24

Family

ID=30953482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9209586U Expired - Lifetime JPH0722852Y2 (ja) 1986-06-16 1986-06-16 イオン注入装置用ビ−ムモニタ

Country Status (1)

Country Link
JP (1) JPH0722852Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4761559A (en) * 1986-09-24 1988-08-02 Eaton Corporation Ion beam implantation display method and apparatus
JPH0821357B2 (ja) * 1987-12-29 1996-03-04 三菱電機株式会社 イオン注入装置におけるイオンビーム調整状態確認装置

Also Published As

Publication number Publication date
JPS62202767U (enrdf_load_stackoverflow) 1987-12-24

Similar Documents

Publication Publication Date Title
JPS6388747A (ja) イオンビームの制御方法及びそのために使用するディスプレイ装置
JPH08102267A (ja) カラー表示装置
JPH0722852Y2 (ja) イオン注入装置用ビ−ムモニタ
JPS5851709B2 (ja) テレビジヨン受像機
KR100374055B1 (ko) 좌우래스터보정장치
US4321468A (en) Method and apparatus for correcting astigmatism in scanning electron microscopes and similar equipment
JP2686492B2 (ja) 透過形電子顕微鏡の照射位置決め方法
SU769661A1 (ru) Способ фокусировки электронного луча
JP2870924B2 (ja) イオンビームのモニタ方法およびその装置
JPH0723898Y2 (ja) イオンビ−ム走査電圧発生装置
EP0002541A1 (en) Apparatus and method for producing an image of internal structure of a subject
JPH0547343A (ja) イオンビームモニタ装置付きイオン注入装置
JPH0719084Y2 (ja) イオン注入装置
JPS6041912B2 (ja) 鮮鋭度改善回路
KR830002233B1 (ko) 비점수차 보정방법
JPH03254053A (ja) 一次電子着地誤差の補正方法
JPH06303448A (ja) フォーカス制御装置
JPH02273784A (ja) ディスプレイ装置
SU1451604A1 (ru) Осциллографический измеритель временных параметров электрических сигналов
JPS5760649A (en) Strobe electron microscope
JPS6313145B2 (enrdf_load_stackoverflow)
JPH0795440A (ja) フォーカス装置
JPH02312152A (ja) イオン注入装置
JPS582673A (ja) 輝点掃引式表示装置の輝度制御回路
JPS6048946B2 (ja) テレビジヨン受像機