JPH0720396Y2 - ターボ分子ポンプのガスパージ機構 - Google Patents

ターボ分子ポンプのガスパージ機構

Info

Publication number
JPH0720396Y2
JPH0720396Y2 JP1988070699U JP7069988U JPH0720396Y2 JP H0720396 Y2 JPH0720396 Y2 JP H0720396Y2 JP 1988070699 U JP1988070699 U JP 1988070699U JP 7069988 U JP7069988 U JP 7069988U JP H0720396 Y2 JPH0720396 Y2 JP H0720396Y2
Authority
JP
Japan
Prior art keywords
shaft
pump
chamber
gas
machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988070699U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01174595U (enrdf_load_stackoverflow
Inventor
重一 川口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1988070699U priority Critical patent/JPH0720396Y2/ja
Publication of JPH01174595U publication Critical patent/JPH01174595U/ja
Application granted granted Critical
Publication of JPH0720396Y2 publication Critical patent/JPH0720396Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP1988070699U 1988-05-27 1988-05-27 ターボ分子ポンプのガスパージ機構 Expired - Lifetime JPH0720396Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988070699U JPH0720396Y2 (ja) 1988-05-27 1988-05-27 ターボ分子ポンプのガスパージ機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988070699U JPH0720396Y2 (ja) 1988-05-27 1988-05-27 ターボ分子ポンプのガスパージ機構

Publications (2)

Publication Number Publication Date
JPH01174595U JPH01174595U (enrdf_load_stackoverflow) 1989-12-12
JPH0720396Y2 true JPH0720396Y2 (ja) 1995-05-15

Family

ID=31295929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988070699U Expired - Lifetime JPH0720396Y2 (ja) 1988-05-27 1988-05-27 ターボ分子ポンプのガスパージ機構

Country Status (1)

Country Link
JP (1) JPH0720396Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4691242B2 (ja) * 2000-11-08 2011-06-01 株式会社大阪真空機器製作所 ターボ分子ポンプのシール構造
JP6079052B2 (ja) * 2012-08-24 2017-02-15 株式会社島津製作所 真空ポンプ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6143298A (ja) * 1984-08-06 1986-03-01 Osaka Shinku Kiki Seisakusho:Kk タ−ボ分子ポンプのガスパ−ジ機構
JPS6385286A (ja) * 1986-09-26 1988-04-15 Hitachi Ltd 真空ポンプ

Also Published As

Publication number Publication date
JPH01174595U (enrdf_load_stackoverflow) 1989-12-12

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