JPH01174595U - - Google Patents

Info

Publication number
JPH01174595U
JPH01174595U JP7069988U JP7069988U JPH01174595U JP H01174595 U JPH01174595 U JP H01174595U JP 7069988 U JP7069988 U JP 7069988U JP 7069988 U JP7069988 U JP 7069988U JP H01174595 U JPH01174595 U JP H01174595U
Authority
JP
Japan
Prior art keywords
pump
shaft
machine room
pump chamber
turbo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7069988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0720396Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988070699U priority Critical patent/JPH0720396Y2/ja
Publication of JPH01174595U publication Critical patent/JPH01174595U/ja
Application granted granted Critical
Publication of JPH0720396Y2 publication Critical patent/JPH0720396Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP1988070699U 1988-05-27 1988-05-27 ターボ分子ポンプのガスパージ機構 Expired - Lifetime JPH0720396Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988070699U JPH0720396Y2 (ja) 1988-05-27 1988-05-27 ターボ分子ポンプのガスパージ機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988070699U JPH0720396Y2 (ja) 1988-05-27 1988-05-27 ターボ分子ポンプのガスパージ機構

Publications (2)

Publication Number Publication Date
JPH01174595U true JPH01174595U (enrdf_load_stackoverflow) 1989-12-12
JPH0720396Y2 JPH0720396Y2 (ja) 1995-05-15

Family

ID=31295929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988070699U Expired - Lifetime JPH0720396Y2 (ja) 1988-05-27 1988-05-27 ターボ分子ポンプのガスパージ機構

Country Status (1)

Country Link
JP (1) JPH0720396Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002147385A (ja) * 2000-11-08 2002-05-22 Osaka Vacuum Ltd ターボ分子ポンプのシール構造
JP2014043789A (ja) * 2012-08-24 2014-03-13 Shimadzu Corp 真空ポンプ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6143298A (ja) * 1984-08-06 1986-03-01 Osaka Shinku Kiki Seisakusho:Kk タ−ボ分子ポンプのガスパ−ジ機構
JPS6385286A (ja) * 1986-09-26 1988-04-15 Hitachi Ltd 真空ポンプ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6143298A (ja) * 1984-08-06 1986-03-01 Osaka Shinku Kiki Seisakusho:Kk タ−ボ分子ポンプのガスパ−ジ機構
JPS6385286A (ja) * 1986-09-26 1988-04-15 Hitachi Ltd 真空ポンプ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002147385A (ja) * 2000-11-08 2002-05-22 Osaka Vacuum Ltd ターボ分子ポンプのシール構造
JP2014043789A (ja) * 2012-08-24 2014-03-13 Shimadzu Corp 真空ポンプ

Also Published As

Publication number Publication date
JPH0720396Y2 (ja) 1995-05-15

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