JPH0713940Y2 - サブテーブル装置 - Google Patents
サブテーブル装置Info
- Publication number
- JPH0713940Y2 JPH0713940Y2 JP4770889U JP4770889U JPH0713940Y2 JP H0713940 Y2 JPH0713940 Y2 JP H0713940Y2 JP 4770889 U JP4770889 U JP 4770889U JP 4770889 U JP4770889 U JP 4770889U JP H0713940 Y2 JPH0713940 Y2 JP H0713940Y2
- Authority
- JP
- Japan
- Prior art keywords
- sub
- grinding
- table device
- feed
- chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000007246 mechanism Effects 0.000 claims description 15
- 239000000463 material Substances 0.000 description 2
- 230000004043 responsiveness Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000010730 cutting oil Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4770889U JPH0713940Y2 (ja) | 1989-04-25 | 1989-04-25 | サブテーブル装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4770889U JPH0713940Y2 (ja) | 1989-04-25 | 1989-04-25 | サブテーブル装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02139042U JPH02139042U (enrdf_load_stackoverflow) | 1990-11-20 |
JPH0713940Y2 true JPH0713940Y2 (ja) | 1995-04-05 |
Family
ID=31563877
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4770889U Expired - Fee Related JPH0713940Y2 (ja) | 1989-04-25 | 1989-04-25 | サブテーブル装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0713940Y2 (enrdf_load_stackoverflow) |
-
1989
- 1989-04-25 JP JP4770889U patent/JPH0713940Y2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH02139042U (enrdf_load_stackoverflow) | 1990-11-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |