JPH07106369A - Connection of electrode - Google Patents

Connection of electrode

Info

Publication number
JPH07106369A
JPH07106369A JP24901193A JP24901193A JPH07106369A JP H07106369 A JPH07106369 A JP H07106369A JP 24901193 A JP24901193 A JP 24901193A JP 24901193 A JP24901193 A JP 24901193A JP H07106369 A JPH07106369 A JP H07106369A
Authority
JP
Japan
Prior art keywords
electrode
lead
substrate
photocurable resin
pressing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24901193A
Other languages
Japanese (ja)
Other versions
JP3031134B2 (en
Inventor
Tomohiro Tamaoki
友博 玉置
Koichi Nagao
浩一 長尾
Hiroaki Fujimoto
博昭 藤本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5249011A priority Critical patent/JP3031134B2/en
Publication of JPH07106369A publication Critical patent/JPH07106369A/en
Application granted granted Critical
Publication of JP3031134B2 publication Critical patent/JP3031134B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To provide a method of improving the reliability of connection of an electrode without leaving a photosetting resin between the electrode and a lead. CONSTITUTION:An electrode 2 and a lead 4 are connected to each other while a photo-setting resin 3 interposing between the electrode and the lead on the center part 7 of the electrode 2 is efficiently extruded by using a projected pressing jig 5 provided with a pressing surface 6 having a constant curvature 9. Thereby, as a bonding agent between the electrode 2 and the lead 4 is extruded, the continuity failure between the electrode and the lead due to a residual bonding agent of the bonding agent is prevented form being generated and the reliability of connection of the electrode is improved.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、半導体素子等の高密
度、薄型、小型の実装における電極の接続方法に関する
ものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of connecting electrodes in high-density, thin, and small-sized packaging of semiconductor elements and the like.

【0002】[0002]

【従来の技術】家電製品、産業用機器などの小型化、薄
型化、ポータブル化にともない、半導体素子、電子部品
などの実装方法の小型化、薄型化が必要になってくる。
半導体素子、電子部品などの電極、あるいはフレキシブ
ルリードなど介して外部端子として取りだした電極と、
配線基板などの電極どうしを接続する一般的な技術は、
はんだ接合、導電性ゴムによる接合、異方性導電性ゴム
を用いた圧接接合、などの方法である。しかしこれらの
方法は、接続工程で加熱が必要である、あるいは電極に
前処理が必要であり、また微小ピッチ電極に対応できな
いなどの問題点がある。
2. Description of the Related Art As home appliances, industrial equipment, etc. are made smaller, thinner, and portable, it is necessary to make semiconductor devices, electronic parts, etc. smaller and thinner.
Electrodes for semiconductor elements, electronic parts, etc., or electrodes taken out as external terminals via flexible leads,
The general technology for connecting electrodes such as wiring boards is
Examples of methods include solder joining, joining with conductive rubber, and pressure welding with anisotropic conductive rubber. However, these methods have problems in that heating is required in the connection step, pretreatment of the electrodes is required, and that fine pitch electrodes cannot be used.

【0003】以下に述べる、光硬化性樹脂を用いた電極
接続技術は、上記の問題点を全て解決している。この技
術は極めて簡便であり、接続工程で無加熱、電極に前処
理が不要、微小ピッチ電極に対応できるなどの特長をも
つ。
The electrode connection technology using a photo-curable resin described below solves all of the above problems. This technology is extremely simple, and has the features that it does not require heating in the connection process, does not require pretreatment of the electrodes, and can be used for fine pitch electrodes.

【0004】以下、図を用いて、光硬化性樹脂を用いた
電極接続の従来の工程を述べる。まず図5(a)のよう
に基板51の電極52に光硬化性樹脂53を塗布し、リ
ード54と基板51の電極52とを位置合わせする。
A conventional process for connecting electrodes using a photocurable resin will be described below with reference to the drawings. First, as shown in FIG. 5A, a photocurable resin 53 is applied to the electrode 52 of the substrate 51, and the lead 54 and the electrode 52 of the substrate 51 are aligned with each other.

【0005】光硬化性樹脂53は絶縁性であり、紫外線
硬化型のエポキシ、シリコン、アクリル系などである。
基板51が半導体素子の場合は、電極52はAlなどで
あり、寸法は30〜150μm、厚さは0.5〜1μm
である。このときのリード54はフィルムキャリア上に
Cuをエッチングにより形成し、Snめっき、Auめっ
きなどを施したものを用いる。
The photo-curable resin 53 is insulative and is made of an ultraviolet-curable epoxy, silicone, acrylic resin or the like.
When the substrate 51 is a semiconductor element, the electrode 52 is made of Al or the like and has a size of 30 to 150 μm and a thickness of 0.5 to 1 μm.
Is. At this time, the lead 54 is formed by etching Cu on the film carrier and performing Sn plating, Au plating, or the like.

【0006】あるいは、基板51がEl、液晶ディスプ
レイパネルの場合は、電極52にSnO2、ITOなど
の導電膜を形成してある。このときのリード54は、ポ
リイミドフィルム、ガラスエポキシフィルム上にCu箔
パターンを形成したものである。
Alternatively, when the substrate 51 is an El and a liquid crystal display panel, a conductive film such as SnO 2 or ITO is formed on the electrode 52. The leads 54 at this time are formed by forming a Cu foil pattern on a polyimide film or a glass epoxy film.

【0007】あるいは、基板51が一般の電子部品であ
り、電極52とリード54の双方に、はんだめっき、A
uめっきなどが形成されている場合にも適用できる。
Alternatively, the substrate 51 is a general electronic component, and solder plating, A
It can also be applied when u plating or the like is formed.

【0008】次に図5(b)のようにリード54を基板
の電極52上に搭載する。このとき、リード54と基板
51の電極52間に光硬化性樹脂53が介在している。
Next, as shown in FIG. 5B, the lead 54 is mounted on the electrode 52 of the substrate. At this time, the photocurable resin 53 is interposed between the lead 54 and the electrode 52 of the substrate 51.

【0009】次に図5(c)のように加圧冶具55によ
りリード54を加圧しリード54と基板51の電極52
とを圧接する。リード54と電極52間に介在する光硬
化性樹脂53は、加圧力により押し出され、リード54
と電極52とは電気的に接合する。ここで用いられる加
圧冶具55の加圧面56は平坦に作られている。また光
硬化性樹脂53が加圧冶具55に付着しないように加圧
冶具55の表面にはテフロンコーティングなどがされて
いる。
Next, as shown in FIG. 5C, the lead 54 is pressed by the pressure jig 55 and the lead 54 and the electrode 52 of the substrate 51.
Press and. The photo-curable resin 53 interposed between the lead 54 and the electrode 52 is pushed out by the pressing force,
And the electrode 52 are electrically connected. The pressing surface 56 of the pressing jig 55 used here is made flat. The surface of the pressure jig 55 is coated with Teflon so that the photo-curable resin 53 does not adhere to the pressure jig 55.

【0010】次に図5(d)のように光硬化性樹脂53
に紫外線を照射し樹脂53を硬化させる。
Next, as shown in FIG. 5D, the photocurable resin 53
The resin 53 is cured by irradiating it with ultraviolet rays.

【0011】次に図5(e)のように加圧を除去して接
合が終了する。加圧を除去しても、光硬化性樹脂53が
硬化しているために、リード54と基板51の電極52
は圧接され、電気的接続が得られる。
Next, as shown in FIG. 5 (e), the pressure is removed to complete the joining. Even if the pressure is removed, the lead 54 and the electrode 52 of the substrate 51 are cured because the photocurable resin 53 is cured.
Are pressed together and an electrical connection is obtained.

【0012】[0012]

【発明が解決しようとする課題】しかしながら上記のよ
うな構成では、次のような問題点がある。
However, the above-mentioned structure has the following problems.

【0013】図6(a)に示すように、加圧面56が平
坦な加圧冶具55を用いてリード54を加圧する。この
とき図6(b)のように、電極52の中央部57と電極
52の端部58に同時にリード54が圧接される。よっ
て、同図(c)のようにリード54と電極52の端部5
8の間の光硬化性樹脂53は押し出されるが、リード5
4と電極52の中央部57の間の光硬化性樹脂53は押
し出されずに残留する。光硬化性樹脂53は絶縁性であ
るため、これが接続不良の原因になるという問題点があ
った。
As shown in FIG. 6A, the lead 54 is pressed by using a pressing jig 55 having a flat pressing surface 56. At this time, as shown in FIG. 6B, the lead 54 is simultaneously pressed into contact with the central portion 57 of the electrode 52 and the end portion 58 of the electrode 52. Therefore, the lead 54 and the end portion 5 of the electrode 52 as shown in FIG.
The photo-curable resin 53 between 8 is extruded, but the lead 5
The photo-curable resin 53 between the electrode 4 and the central portion 57 of the electrode 52 remains without being extruded. Since the photocurable resin 53 is insulative, there is a problem that this causes a connection failure.

【0014】本発明は上記問題点に鑑み、リード54と
電極52間に光硬化性樹脂53が残留しない接続方法を
提供するものである。
In view of the above problems, the present invention provides a connection method in which the photocurable resin 53 does not remain between the lead 54 and the electrode 52.

【0015】[0015]

【課題を解決するための手段】本発明は、第1の基板上
の電極もしくは第1の基板から突出した電極と第2の基
板上の電極との間、もしくは近傍に光硬化性樹脂を介在
させ、加圧面が一定の曲率を有する凸状である加圧冶具
により前記第1の基板上の電極もしくは前記第1の基板
から突出した電極を加圧し、前記第1の基板上の電極も
しくは前記第1の基板から突出した電極と前記第2の基
板上の電極とを圧接し、前記光硬化性樹脂を光硬化させ
るという工程を特徴とする電極の接続方法を提供するも
のである。
According to the present invention, a photocurable resin is interposed between or near an electrode on a first substrate or an electrode protruding from a first substrate and an electrode on a second substrate. Then, the electrode on the first substrate or the electrode protruding from the first substrate is pressed by a pressure jig whose pressing surface is a convex shape having a constant curvature, and the electrode on the first substrate or the It is intended to provide a method for connecting electrodes, which is characterized in that an electrode protruding from a first substrate and an electrode on the second substrate are brought into pressure contact with each other to photo-cur the photo-curable resin.

【0016】[0016]

【作用】本発明は、接続工程において、加圧面が一定の
曲率を有する凸状の加圧冶具を用いている。そのため、
最初に電極の中央部に対応するリードの部分を加圧す
る。そのとき、リードと電極の中央部の間の光硬化性樹
脂は加圧力により押し出される。次いで、電極の端部に
対応するリードの部分を加圧し、リードと電極の端部の
間の光硬化性樹脂は加圧力により押し出される。このた
め、リードと電極の間の光硬化性樹脂は効率的に押し出
され、残留せず、高い接続信頼性が得られる。
According to the present invention, in the connecting step, the convex pressing jig whose pressing surface has a constant curvature is used. for that reason,
First, the portion of the lead corresponding to the central portion of the electrode is pressed. At that time, the photocurable resin between the leads and the central portion of the electrode is pushed out by the pressing force. Then, the portion of the lead corresponding to the end of the electrode is pressed, and the photocurable resin between the lead and the end of the electrode is pushed out by the pressing force. Therefore, the photo-curable resin between the lead and the electrode is efficiently extruded, does not remain, and high connection reliability is obtained.

【0017】[0017]

【実施例】以下図面を参照しながら、本発明の1実施例
を説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

【0018】まず図1(a)のように基板1の電極2に
光硬化性樹脂3を塗布し、リード4と基板1の電極2と
を位置合わせする。
First, as shown in FIG. 1A, a photocurable resin 3 is applied to the electrode 2 of the substrate 1, and the lead 4 and the electrode 2 of the substrate 1 are aligned with each other.

【0019】光硬化性樹脂3は絶縁性であり、紫外線硬
化型のエポキシ、シリコン、アクリル系などである。基
板1が半導体素子の場合は、電極2はAlなどであり、
寸法は30〜150μm、厚さは0.5〜1μmであ
る。このときのリード4はフィルムキャリア上にCuを
エッチングにより形成し、Snめっき、Auめっきなど
を施したものを用いる。
The photocurable resin 3 is insulative, and is made of ultraviolet curable epoxy, silicone, acrylic resin or the like. When the substrate 1 is a semiconductor element, the electrode 2 is Al or the like,
The dimensions are 30 to 150 μm and the thickness is 0.5 to 1 μm. At this time, the lead 4 is formed by etching Cu on the film carrier and performing Sn plating, Au plating, or the like.

【0020】あるいは、基板1がEl、液晶ディスプレ
イパネルの場合は、電極2にSnO2、ITOなどの導
電膜を形成してある。このときのリード4は、ポリイミ
ドフィルム、ガラスエポキシフィルム上にCu箔パター
ンを形成したものである。あるいは、基板1が一般の電
子部品であり、電極2とリード4の双方に、はんだめっ
き、Auめっきなどが形成されている場合にも適用でき
る。
Alternatively, when the substrate 1 is El and a liquid crystal display panel, a conductive film such as SnO 2 or ITO is formed on the electrode 2. At this time, the lead 4 is formed by forming a Cu foil pattern on a polyimide film or a glass epoxy film. Alternatively, it is also applicable when the substrate 1 is a general electronic component and both the electrode 2 and the lead 4 are formed with solder plating, Au plating, or the like.

【0021】次に図1(b)のようにリード4を基板の
電極2上に搭載する。このとき、リード4と基板1の電
極2間に光硬化性樹脂3が介在している。
Next, as shown in FIG. 1B, the lead 4 is mounted on the electrode 2 of the substrate. At this time, the photocurable resin 3 is interposed between the lead 4 and the electrode 2 of the substrate 1.

【0022】次に図1(c)のように加圧冶具5により
リード4を加圧しリード4と基板1の電極2とを圧接す
る。リード4と電極2間に介在する光硬化性樹脂3は、
加圧力により押し出され、リード4と電極2とは電気的
に接合する。ここで用いられる加圧冶具5の加圧面6
は、従来とは異なり、一定の曲率9を有する凸状であ
る。また光硬化性樹脂3が加圧冶具5に付着しないよう
に加圧冶具5の表面にはテフロンコーティングなどがさ
れている。
Next, as shown in FIG. 1C, the lead 4 is pressed by the pressure jig 5 to press the lead 4 and the electrode 2 of the substrate 1 into pressure contact with each other. The photocurable resin 3 interposed between the lead 4 and the electrode 2 is
The lead 4 and the electrode 2 are pushed out by the pressing force and are electrically connected. Pressure surface 6 of pressure jig 5 used here
Is a convex shape having a constant curvature 9 unlike the conventional one. The surface of the pressure jig 5 is coated with Teflon so that the photocurable resin 3 does not adhere to the pressure jig 5.

【0023】次に図1(d)のように光硬化性樹脂3に
紫外線を照射し硬化させる。次に図1(e)のように加
圧を除去して接合が終了する。加圧を除去しても、光硬
化性樹脂3が硬化しているために、リード4と基板1の
電極2は圧接され、電気的接続が得られる。
Next, as shown in FIG. 1D, the photocurable resin 3 is irradiated with ultraviolet rays to be cured. Next, as shown in FIG. 1 (e), the pressure is removed to complete the joining. Even if the pressure is removed, the lead 4 and the electrode 2 of the substrate 1 are pressed against each other because the photo-curable resin 3 is cured, and an electrical connection is obtained.

【0024】加圧面6の有する曲面9は図2(a)のよ
うに2次元的な曲面9(つまり円筒面の一部)と、図2
(b)のように3次元的な曲面9(つまり球面の一部)
がある。2次元的な曲面9を有する加圧冶具5は、斜線
部で示すリード4の加圧領域10が長方形のとき適し、
3次元的な曲面9を有する加圧冶具5は、リード4の加
圧領域10がほぼ正方形、または円形のとき適する。
The curved surface 9 of the pressing surface 6 has a two-dimensional curved surface 9 (that is, a part of a cylindrical surface) as shown in FIG.
A three-dimensional curved surface 9 (that is, a part of a spherical surface) as shown in (b)
There is. The pressure jig 5 having the two-dimensional curved surface 9 is suitable when the pressure area 10 of the lead 4 shown by the hatched portion is rectangular,
The pressing jig 5 having the three-dimensional curved surface 9 is suitable when the pressing area 10 of the lead 4 is substantially square or circular.

【0025】図3を用いて、加圧面6の曲面9の設計方
法を述べる。加圧するリード4の幅をL、電極2の中央
部7に対応するリード4が、電極2の端部8に対応する
リード4よりも厚さDだけ先に圧接されるものとする
と、加圧面6の曲面9の曲率Rは、 R=D/2+L2/(8D) で設計できる。厚さDは、リード4を加圧するときリー
ド4あるいは基板1の電極2が変形して加圧面6の曲面
9の形状を吸収してしまう程度の大きさとする。これ
は、曲面9の形状を吸収しなければ、リード4と電極2
の間に隙間が生じ、そこに光硬化性樹脂3が残留するか
らである。
A method of designing the curved surface 9 of the pressing surface 6 will be described with reference to FIG. If the width of the lead 4 to be pressed is L and the lead 4 corresponding to the central portion 7 of the electrode 2 is pressed by the thickness D earlier than the lead 4 corresponding to the end 8 of the electrode 2, the pressing surface The curvature R of the curved surface 9 of 6 can be designed by R = D / 2 + L 2 / (8D). The thickness D is set so that the lead 4 or the electrode 2 of the substrate 1 is deformed when the lead 4 is pressed to absorb the shape of the curved surface 9 of the pressing surface 6. This is because if the shape of the curved surface 9 is not absorbed, the lead 4 and the electrode 2
This is because there is a gap between the two and the photocurable resin 3 remains there.

【0026】本実施例を用いたときの効果を述べる。図
4(a)のように加圧冶具5の加圧面6が一定の曲面9
を有する凸状であるため、図4(b)のように加圧時、
電極2の中央部7に対応するリード4の部分を最初に加
圧する。そのとき、リード4と電極2の中央部7の間の
光硬化性樹脂3は加圧力により押し出される。
The effect of using this embodiment will be described. As shown in FIG. 4A, the pressing surface 6 of the pressing jig 5 has a constant curved surface 9
Since it has a convex shape with, when pressure is applied as shown in FIG.
The part of the lead 4 corresponding to the central part 7 of the electrode 2 is first pressed. At that time, the photocurable resin 3 between the lead 4 and the central portion 7 of the electrode 2 is pushed out by the pressing force.

【0027】次いで、同図(c)のように電極2の端部
8に対応するリード4の部分を加圧し、リード4と電極
2の端部8の間の光硬化性樹脂3は加圧力により押し出
される。このため、リード4と電極2の間の光硬化性樹
脂3は効率的に押し出され、残留せず、高い接続信頼性
が得られる。以上のように従来の問題点が解決される。
Next, as shown in FIG. 3C, the portion of the lead 4 corresponding to the end 8 of the electrode 2 is pressed, and the photocurable resin 3 between the lead 4 and the end 8 of the electrode 2 is pressed. Is pushed out by. For this reason, the photocurable resin 3 between the lead 4 and the electrode 2 is efficiently extruded, does not remain, and high connection reliability is obtained. As described above, the conventional problems are solved.

【0028】[0028]

【発明の効果】以上のように本発明は、接続工程におい
て、加圧面6が一定の曲面9を有する凸状の加圧冶具5
を用いている。そのため、最初に電極2の中央部7に対
応するリード4の部分を加圧する。そのとき、リード4
と電極2の中央部7の間の光硬化性樹脂3は加圧力によ
り押し出される。次いで、電極2の端部8に対応するリ
ード4の部分を加圧し、リード4と電極2の端部8の間
の光硬化性樹脂3は加圧力により押し出される。このた
め、リード4と電極2の間の光硬化性樹脂3は効率的に
押し出され、残留せず、高い接続信頼性が得られる。
INDUSTRIAL APPLICABILITY As described above, according to the present invention, in the connecting step, the pressurizing jig 5 has a convex surface 6 having a constant curved surface 9.
Is used. Therefore, first, the portion of the lead 4 corresponding to the central portion 7 of the electrode 2 is pressed. Then lead 4
The photocurable resin 3 between the center part 7 of the electrode 2 and the electrode 2 is extruded by the pressing force. Then, the portion of the lead 4 corresponding to the end portion 8 of the electrode 2 is pressed, and the photocurable resin 3 between the lead 4 and the end portion 8 of the electrode 2 is extruded by the pressing force. For this reason, the photocurable resin 3 between the lead 4 and the electrode 2 is efficiently extruded, does not remain, and high connection reliability is obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の電極の接合方法の一実施例における工
程図
FIG. 1 is a process drawing of an embodiment of an electrode joining method of the present invention.

【図2】同実施例工程で用いる加圧冶具の加圧面の形状
の説明図
FIG. 2 is an explanatory view of the shape of the pressing surface of the pressing jig used in the process of the embodiment.

【図3】同実施例工程で用いる加圧冶具の加圧面の形状
の設計方法の説明図
FIG. 3 is an explanatory view of a method for designing the shape of the pressing surface of the pressing jig used in the process of the embodiment.

【図4】本発明の効果の説明図FIG. 4 is an explanatory diagram of the effect of the present invention.

【図5】従来の電極の接合方法を示す工程図FIG. 5 is a process diagram showing a conventional electrode joining method.

【図6】同従来工程の課題の説明図FIG. 6 is an explanatory view of problems in the conventional process.

【符号の説明】[Explanation of symbols]

1 基板 2 電極 3 光硬化性樹脂 4 リード 5 加圧冶具 6 加圧面 7 電極2の中央部 8 電極2の端部 9 曲面の曲率(R) 10 加圧領域 51 従来例の基板 52 従来例の電極 53 従来例の光硬化性樹脂 54 従来例のリード 55 従来例の加圧冶具 56 従来例の加圧面 57 従来例の電極52の中央部 58 従来例の電極52の端部 DESCRIPTION OF SYMBOLS 1 substrate 2 electrode 3 photocurable resin 4 lead 5 pressing jig 6 pressing surface 7 central part of electrode 2 8 end part of electrode 2 curvature of curved surface (R) 10 pressing region 51 substrate of conventional example 52 conventional example Electrode 53 Conventional photocurable resin 54 Conventional example lead 55 Conventional example pressing jig 56 Conventional example pressing surface 57 Central portion of conventional electrode 52 58 End portion of conventional example electrode 52

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】第1の基板上の電極もしくは第1の基板か
ら突出した電極と第2の基板上の電極との間、もしくは
近傍に光硬化性樹脂を介在させ、前記第1の基板上の電
極もしくは前記第1の基板から突出した電極と前記第2
の基板上の電極を位置合わせする工程、加圧面が一定の
曲率を有する凸状である加圧冶具により前記第1の基板
上の電極もしくは前記第1の基板から突出した電極を加
圧し、前記第1の基板上の電極もしくは前記第1の基板
から突出した電極と前記第2の基板上の電極とを圧接す
る工程、前記光硬化性樹脂を光硬化させる工程からなる
ことを特徴とする電極の接続方法。
1. A photocurable resin is interposed between or near an electrode on a first substrate or an electrode protruding from a first substrate and an electrode on a second substrate to form a light-curable resin on the first substrate. Electrode or the electrode protruding from the first substrate and the second electrode
The step of aligning the electrodes on the substrate, pressing the electrodes on the first substrate or the electrodes protruding from the first substrate with a pressing jig whose pressing surface has a convex shape having a constant curvature, An electrode comprising a step of press-contacting an electrode on a first substrate or an electrode protruding from the first substrate with an electrode on the second substrate, and a step of photocuring the photocurable resin. Connection method.
JP5249011A 1993-10-05 1993-10-05 How to connect electrodes Expired - Fee Related JP3031134B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5249011A JP3031134B2 (en) 1993-10-05 1993-10-05 How to connect electrodes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5249011A JP3031134B2 (en) 1993-10-05 1993-10-05 How to connect electrodes

Publications (2)

Publication Number Publication Date
JPH07106369A true JPH07106369A (en) 1995-04-21
JP3031134B2 JP3031134B2 (en) 2000-04-10

Family

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Country Status (1)

Country Link
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005197610A (en) * 2004-01-09 2005-07-21 Sony Corp Method and device for assembling microstructure, and method for manufacturing electronic application device
CN110190042A (en) * 2019-06-26 2019-08-30 云谷(固安)科技有限公司 Bind structure, binding method, display panel and display device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005197610A (en) * 2004-01-09 2005-07-21 Sony Corp Method and device for assembling microstructure, and method for manufacturing electronic application device
JP4534491B2 (en) * 2004-01-09 2010-09-01 ソニー株式会社 Manufacturing method of electronic application apparatus and assembly method of microrod transistor
CN110190042A (en) * 2019-06-26 2019-08-30 云谷(固安)科技有限公司 Bind structure, binding method, display panel and display device

Also Published As

Publication number Publication date
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