JPH069497Y2 - 半導体材料乾燥装置 - Google Patents

半導体材料乾燥装置

Info

Publication number
JPH069497Y2
JPH069497Y2 JP1987001650U JP165087U JPH069497Y2 JP H069497 Y2 JPH069497 Y2 JP H069497Y2 JP 1987001650 U JP1987001650 U JP 1987001650U JP 165087 U JP165087 U JP 165087U JP H069497 Y2 JPH069497 Y2 JP H069497Y2
Authority
JP
Japan
Prior art keywords
casing
rotor
semiconductor material
water
guide member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987001650U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63110031U (enExample
Inventor
康 上野
英明 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP1987001650U priority Critical patent/JPH069497Y2/ja
Publication of JPS63110031U publication Critical patent/JPS63110031U/ja
Application granted granted Critical
Publication of JPH069497Y2 publication Critical patent/JPH069497Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Centrifugal Separators (AREA)
JP1987001650U 1987-01-09 1987-01-09 半導体材料乾燥装置 Expired - Lifetime JPH069497Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987001650U JPH069497Y2 (ja) 1987-01-09 1987-01-09 半導体材料乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987001650U JPH069497Y2 (ja) 1987-01-09 1987-01-09 半導体材料乾燥装置

Publications (2)

Publication Number Publication Date
JPS63110031U JPS63110031U (enExample) 1988-07-15
JPH069497Y2 true JPH069497Y2 (ja) 1994-03-09

Family

ID=30779759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987001650U Expired - Lifetime JPH069497Y2 (ja) 1987-01-09 1987-01-09 半導体材料乾燥装置

Country Status (1)

Country Link
JP (1) JPH069497Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5846642A (ja) * 1981-09-12 1983-03-18 Mitsubishi Electric Corp ウエ−ハ洗浄乾燥装置

Also Published As

Publication number Publication date
JPS63110031U (enExample) 1988-07-15

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