JPH0650539Y2 - スパッタ装置の基板冷却構造 - Google Patents

スパッタ装置の基板冷却構造

Info

Publication number
JPH0650539Y2
JPH0650539Y2 JP4440090U JP4440090U JPH0650539Y2 JP H0650539 Y2 JPH0650539 Y2 JP H0650539Y2 JP 4440090 U JP4440090 U JP 4440090U JP 4440090 U JP4440090 U JP 4440090U JP H0650539 Y2 JPH0650539 Y2 JP H0650539Y2
Authority
JP
Japan
Prior art keywords
substrate
base plate
insulating substrate
cooling
refrigerant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4440090U
Other languages
English (en)
Japanese (ja)
Other versions
JPH044060U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
修二 竹下
博光 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4440090U priority Critical patent/JPH0650539Y2/ja
Publication of JPH044060U publication Critical patent/JPH044060U/ja
Application granted granted Critical
Publication of JPH0650539Y2 publication Critical patent/JPH0650539Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP4440090U 1990-04-24 1990-04-24 スパッタ装置の基板冷却構造 Expired - Lifetime JPH0650539Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4440090U JPH0650539Y2 (ja) 1990-04-24 1990-04-24 スパッタ装置の基板冷却構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4440090U JPH0650539Y2 (ja) 1990-04-24 1990-04-24 スパッタ装置の基板冷却構造

Publications (2)

Publication Number Publication Date
JPH044060U JPH044060U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-01-14
JPH0650539Y2 true JPH0650539Y2 (ja) 1994-12-21

Family

ID=31557668

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4440090U Expired - Lifetime JPH0650539Y2 (ja) 1990-04-24 1990-04-24 スパッタ装置の基板冷却構造

Country Status (1)

Country Link
JP (1) JPH0650539Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0811718B2 (ja) * 1992-02-27 1996-02-07 大同ほくさん株式会社 ガスソース分子線エピタキシー装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6354790B2 (ja) 2015-05-29 2018-07-11 Ｊｆｅスチール株式会社 高強度高靭性鋼管用鋼板の製造方法及び高強度高靭性鋼管用鋼板

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6354790B2 (ja) 2015-05-29 2018-07-11 Ｊｆｅスチール株式会社 高強度高靭性鋼管用鋼板の製造方法及び高強度高靭性鋼管用鋼板

Also Published As

Publication number Publication date
JPH044060U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-01-14

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