JPH0648879Y2 - メモリ装置 - Google Patents
メモリ装置Info
- Publication number
- JPH0648879Y2 JPH0648879Y2 JP1988106792U JP10679288U JPH0648879Y2 JP H0648879 Y2 JPH0648879 Y2 JP H0648879Y2 JP 1988106792 U JP1988106792 U JP 1988106792U JP 10679288 U JP10679288 U JP 10679288U JP H0648879 Y2 JPH0648879 Y2 JP H0648879Y2
- Authority
- JP
- Japan
- Prior art keywords
- memory cell
- peripheral circuit
- layer
- interlayer insulating
- memory device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000002093 peripheral effect Effects 0.000 claims description 18
- 239000011229 interlayer Substances 0.000 claims description 14
- 239000010410 layer Substances 0.000 description 21
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 8
- 230000010354 integration Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000002184 metal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Semiconductor Memories (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988106792U JPH0648879Y2 (ja) | 1988-08-12 | 1988-08-12 | メモリ装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988106792U JPH0648879Y2 (ja) | 1988-08-12 | 1988-08-12 | メモリ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0227748U JPH0227748U (US06623731-20030923-C00012.png) | 1990-02-22 |
JPH0648879Y2 true JPH0648879Y2 (ja) | 1994-12-12 |
Family
ID=31340623
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988106792U Expired - Lifetime JPH0648879Y2 (ja) | 1988-08-12 | 1988-08-12 | メモリ装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0648879Y2 (US06623731-20030923-C00012.png) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61125152A (ja) * | 1984-11-22 | 1986-06-12 | Fujitsu Ltd | 半導体装置の製造方法 |
EP0191612A2 (en) * | 1985-02-09 | 1986-08-20 | Fujitsu Limited | Semiconductor memory device having stacked-capacitor type memory cells and a manufacturing method for the same |
-
1988
- 1988-08-12 JP JP1988106792U patent/JPH0648879Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61125152A (ja) * | 1984-11-22 | 1986-06-12 | Fujitsu Ltd | 半導体装置の製造方法 |
EP0191612A2 (en) * | 1985-02-09 | 1986-08-20 | Fujitsu Limited | Semiconductor memory device having stacked-capacitor type memory cells and a manufacturing method for the same |
Also Published As
Publication number | Publication date |
---|---|
JPH0227748U (US06623731-20030923-C00012.png) | 1990-02-22 |
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