JPH0648852Y2 - イオン注入装置におけるプラテン装置 - Google Patents

イオン注入装置におけるプラテン装置

Info

Publication number
JPH0648852Y2
JPH0648852Y2 JP1985116482U JP11648285U JPH0648852Y2 JP H0648852 Y2 JPH0648852 Y2 JP H0648852Y2 JP 1985116482 U JP1985116482 U JP 1985116482U JP 11648285 U JP11648285 U JP 11648285U JP H0648852 Y2 JPH0648852 Y2 JP H0648852Y2
Authority
JP
Japan
Prior art keywords
platen
wafer
ion implantation
rotating shaft
platen device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985116482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6226036U (un
Inventor
茂樹 本多
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP1985116482U priority Critical patent/JPH0648852Y2/ja
Publication of JPS6226036U publication Critical patent/JPS6226036U/ja
Application granted granted Critical
Publication of JPH0648852Y2 publication Critical patent/JPH0648852Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1985116482U 1985-07-31 1985-07-31 イオン注入装置におけるプラテン装置 Expired - Lifetime JPH0648852Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985116482U JPH0648852Y2 (ja) 1985-07-31 1985-07-31 イオン注入装置におけるプラテン装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985116482U JPH0648852Y2 (ja) 1985-07-31 1985-07-31 イオン注入装置におけるプラテン装置

Publications (2)

Publication Number Publication Date
JPS6226036U JPS6226036U (un) 1987-02-17
JPH0648852Y2 true JPH0648852Y2 (ja) 1994-12-12

Family

ID=31001113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985116482U Expired - Lifetime JPH0648852Y2 (ja) 1985-07-31 1985-07-31 イオン注入装置におけるプラテン装置

Country Status (1)

Country Link
JP (1) JPH0648852Y2 (un)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5984838U (ja) * 1982-11-30 1984-06-08 日本電気ホームエレクトロニクス株式会社 ウエ−ハ加熱装置

Also Published As

Publication number Publication date
JPS6226036U (un) 1987-02-17

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