JPH0648843Y2 - 半導体処理用移送装置 - Google Patents

半導体処理用移送装置

Info

Publication number
JPH0648843Y2
JPH0648843Y2 JP6440085U JP6440085U JPH0648843Y2 JP H0648843 Y2 JPH0648843 Y2 JP H0648843Y2 JP 6440085 U JP6440085 U JP 6440085U JP 6440085 U JP6440085 U JP 6440085U JP H0648843 Y2 JPH0648843 Y2 JP H0648843Y2
Authority
JP
Japan
Prior art keywords
semiconductor
transfer
cartridge
transfer means
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6440085U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61179749U (ko
Inventor
静二郎 川田
Original Assignee
株式会社デンコ−
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社デンコ− filed Critical 株式会社デンコ−
Priority to JP6440085U priority Critical patent/JPH0648843Y2/ja
Publication of JPS61179749U publication Critical patent/JPS61179749U/ja
Application granted granted Critical
Publication of JPH0648843Y2 publication Critical patent/JPH0648843Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Intermediate Stations On Conveyors (AREA)
JP6440085U 1985-04-30 1985-04-30 半導体処理用移送装置 Expired - Lifetime JPH0648843Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6440085U JPH0648843Y2 (ja) 1985-04-30 1985-04-30 半導体処理用移送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6440085U JPH0648843Y2 (ja) 1985-04-30 1985-04-30 半導体処理用移送装置

Publications (2)

Publication Number Publication Date
JPS61179749U JPS61179749U (ko) 1986-11-10
JPH0648843Y2 true JPH0648843Y2 (ja) 1994-12-12

Family

ID=30595449

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6440085U Expired - Lifetime JPH0648843Y2 (ja) 1985-04-30 1985-04-30 半導体処理用移送装置

Country Status (1)

Country Link
JP (1) JPH0648843Y2 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0810680B2 (ja) * 1987-05-08 1996-01-31 東京エレクトロン東北株式会社 熱処理用ボ−ト

Also Published As

Publication number Publication date
JPS61179749U (ko) 1986-11-10

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