JPH0648828Y2 - 汚染防止器 - Google Patents
汚染防止器Info
- Publication number
- JPH0648828Y2 JPH0648828Y2 JP3986289U JP3986289U JPH0648828Y2 JP H0648828 Y2 JPH0648828 Y2 JP H0648828Y2 JP 3986289 U JP3986289 U JP 3986289U JP 3986289 U JP3986289 U JP 3986289U JP H0648828 Y2 JPH0648828 Y2 JP H0648828Y2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- reaction chamber
- mixing chamber
- pollution control
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000003344 environmental pollutant Substances 0.000 claims description 4
- 231100000719 pollutant Toxicity 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 2
- 230000001376 precipitating effect Effects 0.000 claims 1
- 239000011888 foil Substances 0.000 description 11
- 229910001220 stainless steel Inorganic materials 0.000 description 7
- 239000010935 stainless steel Substances 0.000 description 7
- 238000000151 deposition Methods 0.000 description 4
- 239000000376 reactant Substances 0.000 description 4
- 239000007795 chemical reaction product Substances 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229920000049 Carbon (fiber) Polymers 0.000 description 2
- 150000001495 arsenic compounds Chemical class 0.000 description 2
- 239000004917 carbon fiber Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Prevention Of Fouling (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3986289U JPH0648828Y2 (ja) | 1989-04-03 | 1989-04-03 | 汚染防止器 |
| US07/457,140 US4979465A (en) | 1989-04-03 | 1989-12-26 | Apparatus for producing semiconductors |
| KR1019900000346A KR950000511B1 (ko) | 1989-04-03 | 1990-01-11 | 반도체 제조장치 |
| DE69012409T DE69012409T2 (de) | 1989-04-03 | 1990-03-16 | Vorrichtung zur Herstellung von Halbleitern durch Abscheidung aus der Gasphase. |
| EP90302831A EP0396239B1 (en) | 1989-04-03 | 1990-03-16 | Apparatus for producing semiconductors by vapour phase deposition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3986289U JPH0648828Y2 (ja) | 1989-04-03 | 1989-04-03 | 汚染防止器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02131335U JPH02131335U (enExample) | 1990-10-31 |
| JPH0648828Y2 true JPH0648828Y2 (ja) | 1994-12-12 |
Family
ID=31549141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3986289U Expired - Fee Related JPH0648828Y2 (ja) | 1989-04-03 | 1989-04-03 | 汚染防止器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648828Y2 (enExample) |
-
1989
- 1989-04-03 JP JP3986289U patent/JPH0648828Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02131335U (enExample) | 1990-10-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |