JPH02131335U - - Google Patents

Info

Publication number
JPH02131335U
JPH02131335U JP1989039862U JP3986289U JPH02131335U JP H02131335 U JPH02131335 U JP H02131335U JP 1989039862 U JP1989039862 U JP 1989039862U JP 3986289 U JP3986289 U JP 3986289U JP H02131335 U JPH02131335 U JP H02131335U
Authority
JP
Japan
Prior art keywords
mixing chamber
contamination
chamber
preventer
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1989039862U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0648828Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989039862U priority Critical patent/JPH0648828Y2/ja
Priority to US07/457,140 priority patent/US4979465A/en
Priority to KR1019900000346A priority patent/KR950000511B1/ko
Priority to DE69012409T priority patent/DE69012409T2/de
Priority to EP90302831A priority patent/EP0396239B1/en
Publication of JPH02131335U publication Critical patent/JPH02131335U/ja
Application granted granted Critical
Publication of JPH0648828Y2 publication Critical patent/JPH0648828Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Prevention Of Fouling (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP1989039862U 1989-04-03 1989-04-03 汚染防止器 Expired - Fee Related JPH0648828Y2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP1989039862U JPH0648828Y2 (ja) 1989-04-03 1989-04-03 汚染防止器
US07/457,140 US4979465A (en) 1989-04-03 1989-12-26 Apparatus for producing semiconductors
KR1019900000346A KR950000511B1 (ko) 1989-04-03 1990-01-11 반도체 제조장치
DE69012409T DE69012409T2 (de) 1989-04-03 1990-03-16 Vorrichtung zur Herstellung von Halbleitern durch Abscheidung aus der Gasphase.
EP90302831A EP0396239B1 (en) 1989-04-03 1990-03-16 Apparatus for producing semiconductors by vapour phase deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989039862U JPH0648828Y2 (ja) 1989-04-03 1989-04-03 汚染防止器

Publications (2)

Publication Number Publication Date
JPH02131335U true JPH02131335U (enExample) 1990-10-31
JPH0648828Y2 JPH0648828Y2 (ja) 1994-12-12

Family

ID=31549141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989039862U Expired - Fee Related JPH0648828Y2 (ja) 1989-04-03 1989-04-03 汚染防止器

Country Status (1)

Country Link
JP (1) JPH0648828Y2 (enExample)

Also Published As

Publication number Publication date
JPH0648828Y2 (ja) 1994-12-12

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees