ATE116380T1 - Verfahren und vorrichtung zum abscheiden von beschichtungen aus einer feinkörnigen und/oder gleichachsigen kornstruktur und daraus erhaltene werkstücke. - Google Patents

Verfahren und vorrichtung zum abscheiden von beschichtungen aus einer feinkörnigen und/oder gleichachsigen kornstruktur und daraus erhaltene werkstücke.

Info

Publication number
ATE116380T1
ATE116380T1 AT90109848T AT90109848T ATE116380T1 AT E116380 T1 ATE116380 T1 AT E116380T1 AT 90109848 T AT90109848 T AT 90109848T AT 90109848 T AT90109848 T AT 90109848T AT E116380 T1 ATE116380 T1 AT E116380T1
Authority
AT
Austria
Prior art keywords
fine
coatings
grailed
deposing
equi
Prior art date
Application number
AT90109848T
Other languages
English (en)
Inventor
David Winfield Woodruff
Joan Marie Redwing
Original Assignee
Gen Electric
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gen Electric filed Critical Gen Electric
Application granted granted Critical
Publication of ATE116380T1 publication Critical patent/ATE116380T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/08—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal halides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/083—Bonding or fixing with the support or substrate
    • H01J2235/084—Target-substrate interlayers or structures, e.g. to control or prevent diffusion or improve adhesion
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12625—Free carbon containing component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
    • Y10T428/12826—Group VIB metal-base component
    • Y10T428/1284—W-base component

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
AT90109848T 1989-06-09 1990-05-23 Verfahren und vorrichtung zum abscheiden von beschichtungen aus einer feinkörnigen und/oder gleichachsigen kornstruktur und daraus erhaltene werkstücke. ATE116380T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/363,833 US4920012A (en) 1989-06-09 1989-06-09 Articles having coatings of fine-grained and/or equiaxed grain structure

Publications (1)

Publication Number Publication Date
ATE116380T1 true ATE116380T1 (de) 1995-01-15

Family

ID=23431937

Family Applications (1)

Application Number Title Priority Date Filing Date
AT90109848T ATE116380T1 (de) 1989-06-09 1990-05-23 Verfahren und vorrichtung zum abscheiden von beschichtungen aus einer feinkörnigen und/oder gleichachsigen kornstruktur und daraus erhaltene werkstücke.

Country Status (5)

Country Link
US (1) US4920012A (de)
EP (1) EP0401602B1 (de)
JP (1) JPH0382765A (de)
AT (1) ATE116380T1 (de)
DE (1) DE69015448T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT392760B (de) * 1989-05-26 1991-06-10 Plansee Metallwerk Verbundkoerper aus graphit und hochschmelzendem metall
US5110760A (en) * 1990-09-28 1992-05-05 The United States Of America As Represented By The Secretary Of The Navy Method of nanometer lithography
JP2955605B2 (ja) * 1991-05-17 1999-10-04 東京タングステン株式会社 Ｘ線管用回転陽極及びその製造方法
US5148463A (en) * 1991-11-04 1992-09-15 General Electric Company Adherent focal track structures for X-ray target anodes having diffusion barrier film therein and method of preparation thereof
JP3277226B2 (ja) * 1992-07-03 2002-04-22 株式会社アライドマテリアル Ｘ線管用回転陽極及びその製造方法
EP0756308B1 (de) * 1994-03-28 1999-12-29 Hitachi, Ltd. Röntgenröhre und anodentarget dafür
JPH08129980A (ja) * 1994-10-28 1996-05-21 Shimadzu Corp Ｘ線管用陽極
US5577263A (en) * 1995-03-22 1996-11-19 Alliedsignal Inc. Chemical vapor deposition of fine grained rhenium on carbon based substrates
US5686733A (en) * 1996-03-29 1997-11-11 Mcgill University Megavoltage imaging method using a combination of a photoreceptor with a high energy photon converter and intensifier
AT1984U1 (de) * 1997-04-22 1998-02-25 Plansee Ag Verfahren zur herstellung einer anode für röntgenröhren
KR100745130B1 (ko) * 2006-02-09 2007-08-01 삼성전자주식회사 박막 증착 장치 및 방법
JP4599454B1 (ja) 2009-09-07 2010-12-15 株式会社オーバル 容積式気液二相流量計及び多相流量計測システム
FR2962591B1 (fr) * 2010-07-06 2017-04-14 Acerde Anode pour l'emission de rayons x et procede de fabrication d'une telle anode

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3024522A (en) * 1959-07-24 1962-03-13 Gen Electric Rhenium bonded composite material and method
US3072983A (en) * 1960-05-31 1963-01-15 Brenner Abner Vapor deposition of tungsten
US3459678A (en) * 1966-01-03 1969-08-05 Eastman Kodak Co Olefin hydration catalyst
AT278184B (de) * 1967-08-28 1970-01-26 Plansee Metallwerk Drehanode für Röntgenröhren
US3637374A (en) * 1968-05-27 1972-01-25 Fansteel Metallurgical Corp Method of producing tungsten rhenium alloys by chemical vapor deposition
AT289967B (de) * 1969-07-24 1971-05-10 Plansee Metallwerk Anode für Röntgenröhren
US3703405A (en) * 1970-10-27 1972-11-21 Atomic Energy Commission Vapor deposition of rhenium and rhenium-tungsten alloy coatings
US3889634A (en) * 1971-06-17 1975-06-17 Coats Ltd J & P Method of and apparatus for producing liquid impregnated fibrous material
FR2263102A1 (en) * 1974-03-04 1975-10-03 Pierrelatte Usines Chimiques Determn. of metals by atomic absorption spectrophotometry - using graphite tube coated with rhenium followed by tungsten
US4005698A (en) * 1974-10-18 1977-02-01 International Business Machines Corporation Photon energy converter
US3982148A (en) * 1975-05-07 1976-09-21 Ultramet Heat radiating coating and method of manufacture thereof
DE3162221D1 (en) * 1980-04-11 1984-03-22 Tokyo Shibaura Electric Co A rotary anode for an x-ray tube and a method for manufacturing the same

Also Published As

Publication number Publication date
DE69015448T2 (de) 1995-07-13
US4920012A (en) 1990-04-24
JPH0382765A (ja) 1991-04-08
EP0401602B1 (de) 1994-12-28
DE69015448D1 (de) 1995-02-09
EP0401602A1 (de) 1990-12-12

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