JPH0645965Y2 - ペリクル用容器 - Google Patents

ペリクル用容器

Info

Publication number
JPH0645965Y2
JPH0645965Y2 JP1988016037U JP1603788U JPH0645965Y2 JP H0645965 Y2 JPH0645965 Y2 JP H0645965Y2 JP 1988016037 U JP1988016037 U JP 1988016037U JP 1603788 U JP1603788 U JP 1603788U JP H0645965 Y2 JPH0645965 Y2 JP H0645965Y2
Authority
JP
Japan
Prior art keywords
pellicle
container
lid
container body
inner bottom
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988016037U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01120148U (enExample
Inventor
敏男 賀屋
広秋 中川
Original Assignee
三井石油化学工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三井石油化学工業株式会社 filed Critical 三井石油化学工業株式会社
Priority to JP1988016037U priority Critical patent/JPH0645965Y2/ja
Publication of JPH01120148U publication Critical patent/JPH01120148U/ja
Application granted granted Critical
Publication of JPH0645965Y2 publication Critical patent/JPH0645965Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP1988016037U 1988-02-09 1988-02-09 ペリクル用容器 Expired - Lifetime JPH0645965Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988016037U JPH0645965Y2 (ja) 1988-02-09 1988-02-09 ペリクル用容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988016037U JPH0645965Y2 (ja) 1988-02-09 1988-02-09 ペリクル用容器

Publications (2)

Publication Number Publication Date
JPH01120148U JPH01120148U (enExample) 1989-08-15
JPH0645965Y2 true JPH0645965Y2 (ja) 1994-11-24

Family

ID=31228617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988016037U Expired - Lifetime JPH0645965Y2 (ja) 1988-02-09 1988-02-09 ペリクル用容器

Country Status (1)

Country Link
JP (1) JPH0645965Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007328226A (ja) * 2006-06-09 2007-12-20 Shin Etsu Chem Co Ltd ペリクル収納容器及びその製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0123138Y2 (enExample) * 1985-09-04 1989-07-17
JPS62143948U (enExample) * 1986-03-07 1987-09-10
US4697701A (en) * 1986-05-30 1987-10-06 Inko Industrial Corporation Dust free storage container for a membrane assembly such as a pellicle and its method of use
JPS63140526U (enExample) * 1987-03-06 1988-09-16

Also Published As

Publication number Publication date
JPH01120148U (enExample) 1989-08-15

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