JPH0644092Y2 - 電子ビ−ム描画装置 - Google Patents

電子ビ−ム描画装置

Info

Publication number
JPH0644092Y2
JPH0644092Y2 JP1986193709U JP19370986U JPH0644092Y2 JP H0644092 Y2 JPH0644092 Y2 JP H0644092Y2 JP 1986193709 U JP1986193709 U JP 1986193709U JP 19370986 U JP19370986 U JP 19370986U JP H0644092 Y2 JPH0644092 Y2 JP H0644092Y2
Authority
JP
Japan
Prior art keywords
slit
base
electron beam
substrate
beam drawing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986193709U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6398628U (enrdf_load_stackoverflow
Inventor
浩 安田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1986193709U priority Critical patent/JPH0644092Y2/ja
Publication of JPS6398628U publication Critical patent/JPS6398628U/ja
Application granted granted Critical
Publication of JPH0644092Y2 publication Critical patent/JPH0644092Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1986193709U 1986-12-18 1986-12-18 電子ビ−ム描画装置 Expired - Lifetime JPH0644092Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986193709U JPH0644092Y2 (ja) 1986-12-18 1986-12-18 電子ビ−ム描画装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986193709U JPH0644092Y2 (ja) 1986-12-18 1986-12-18 電子ビ−ム描画装置

Publications (2)

Publication Number Publication Date
JPS6398628U JPS6398628U (enrdf_load_stackoverflow) 1988-06-25
JPH0644092Y2 true JPH0644092Y2 (ja) 1994-11-14

Family

ID=31149987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986193709U Expired - Lifetime JPH0644092Y2 (ja) 1986-12-18 1986-12-18 電子ビ−ム描画装置

Country Status (1)

Country Link
JP (1) JPH0644092Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53143175A (en) * 1977-05-20 1978-12-13 Hitachi Ltd Electron beam drawing apparatus
JPS59111326A (ja) * 1982-12-17 1984-06-27 Hitachi Ltd 電子ビ−ム整形用アパ−チヤマスク

Also Published As

Publication number Publication date
JPS6398628U (enrdf_load_stackoverflow) 1988-06-25

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