JPH064301Y2 - 半導体圧力センサ - Google Patents

半導体圧力センサ

Info

Publication number
JPH064301Y2
JPH064301Y2 JP1987122671U JP12267187U JPH064301Y2 JP H064301 Y2 JPH064301 Y2 JP H064301Y2 JP 1987122671 U JP1987122671 U JP 1987122671U JP 12267187 U JP12267187 U JP 12267187U JP H064301 Y2 JPH064301 Y2 JP H064301Y2
Authority
JP
Japan
Prior art keywords
sensor chip
semiconductor substrate
semiconductor
thermal expansion
glass layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987122671U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6427635U (enrdf_load_stackoverflow
Inventor
正 大島
龍彦 宮内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP1987122671U priority Critical patent/JPH064301Y2/ja
Publication of JPS6427635U publication Critical patent/JPS6427635U/ja
Application granted granted Critical
Publication of JPH064301Y2 publication Critical patent/JPH064301Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP1987122671U 1987-08-11 1987-08-11 半導体圧力センサ Expired - Lifetime JPH064301Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987122671U JPH064301Y2 (ja) 1987-08-11 1987-08-11 半導体圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987122671U JPH064301Y2 (ja) 1987-08-11 1987-08-11 半導体圧力センサ

Publications (2)

Publication Number Publication Date
JPS6427635U JPS6427635U (enrdf_load_stackoverflow) 1989-02-17
JPH064301Y2 true JPH064301Y2 (ja) 1994-02-02

Family

ID=31370817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987122671U Expired - Lifetime JPH064301Y2 (ja) 1987-08-11 1987-08-11 半導体圧力センサ

Country Status (1)

Country Link
JP (1) JPH064301Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015007626A (ja) * 2013-06-19 2015-01-15 ハネウェル・インターナショナル・インコーポレーテッド シリコン応力隔離部材を有する統合ｓｏｉ圧力センサ

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7476695B2 (en) 2004-03-16 2009-01-13 Nissan Chemical Industries, Ltd. Modified stannic oxide-zirconium oxide complex sol and method for preparing same
JP4683618B2 (ja) * 2005-02-10 2011-05-18 キヤノンアネルバ株式会社 隔膜型圧力センサ及びその製造方法
US8371175B2 (en) * 2009-10-01 2013-02-12 Rosemount Inc. Pressure transmitter with pressure sensor mount

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441304B2 (enrdf_load_stackoverflow) * 1974-01-25 1979-12-07
JPS54138384A (en) * 1978-04-19 1979-10-26 Mitsubishi Electric Corp Semiconductor pressure converter
JPS57171235A (en) * 1981-04-15 1982-10-21 Toshiba Corp Semiconductor pressure converter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015007626A (ja) * 2013-06-19 2015-01-15 ハネウェル・インターナショナル・インコーポレーテッド シリコン応力隔離部材を有する統合ｓｏｉ圧力センサ

Also Published As

Publication number Publication date
JPS6427635U (enrdf_load_stackoverflow) 1989-02-17

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