JPH0641235Y2 - 感光材料露光装置 - Google Patents

感光材料露光装置

Info

Publication number
JPH0641235Y2
JPH0641235Y2 JP1987170082U JP17008287U JPH0641235Y2 JP H0641235 Y2 JPH0641235 Y2 JP H0641235Y2 JP 1987170082 U JP1987170082 U JP 1987170082U JP 17008287 U JP17008287 U JP 17008287U JP H0641235 Y2 JPH0641235 Y2 JP H0641235Y2
Authority
JP
Japan
Prior art keywords
photosensitive material
original
holding table
light source
document
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987170082U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0197330U (cs
Inventor
彬夫 広町
Original Assignee
株式会社ウシオユーテック
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社ウシオユーテック filed Critical 株式会社ウシオユーテック
Priority to JP1987170082U priority Critical patent/JPH0641235Y2/ja
Publication of JPH0197330U publication Critical patent/JPH0197330U/ja
Application granted granted Critical
Publication of JPH0641235Y2 publication Critical patent/JPH0641235Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Optical Systems Of Projection Type Copiers (AREA)
  • Holders For Sensitive Materials And Originals (AREA)
  • Exposure Or Original Feeding In Electrophotography (AREA)
JP1987170082U 1987-11-09 1987-11-09 感光材料露光装置 Expired - Lifetime JPH0641235Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987170082U JPH0641235Y2 (ja) 1987-11-09 1987-11-09 感光材料露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987170082U JPH0641235Y2 (ja) 1987-11-09 1987-11-09 感光材料露光装置

Publications (2)

Publication Number Publication Date
JPH0197330U JPH0197330U (cs) 1989-06-28
JPH0641235Y2 true JPH0641235Y2 (ja) 1994-10-26

Family

ID=31460710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987170082U Expired - Lifetime JPH0641235Y2 (ja) 1987-11-09 1987-11-09 感光材料露光装置

Country Status (1)

Country Link
JP (1) JPH0641235Y2 (cs)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55126246A (en) * 1979-03-22 1980-09-29 Fujitsu Ltd Contact printer for mask manufacture
JPS5828854U (ja) * 1981-08-20 1983-02-24 大東株式会社 スリツト露光方式の複写機の露光装置

Also Published As

Publication number Publication date
JPH0197330U (cs) 1989-06-28

Similar Documents

Publication Publication Date Title
JPS6324618A (ja) 露光方法
JPH0749575A (ja) 露光における位置合わせ方法および装置
JP2004071729A (ja) レチクル保持方法、レチクル保持装置及び露光装置
JPH0641235Y2 (ja) 感光材料露光装置
JP3956454B2 (ja) レンズ支持装置、支持方法および投影露光装置
US4669868A (en) Step and repeat exposure apparatus and method
GB2141257A (en) Apparatus for mounting an image-carrying substrate on a mounting sheet with the image at a desired orientation
JP2672535B2 (ja) 露光装置
JPH06325996A (ja) レティクルフレーム
JP3068398B2 (ja) レチクルの製造方法およびその製造装置
JP2872693B2 (ja) 乾板の露光装置
JP2001176791A (ja) 露光方法、露光装置およびペリクル
JPS60123028A (ja) 露光装置
KR100566096B1 (ko) 노광 장치
JP3223826B2 (ja) 基板上の不要レジスト露光装置
JP3413947B2 (ja) 周辺露光装置
JPH01251716A (ja) パターン転写装置
JPH0235445B2 (cs)
JPS59191039A (ja) 投影露光装置
JPH0822131A (ja) 露光における位置合わせ装置
JPH0227811B2 (cs)
JPS6131330Y2 (cs)
JP2006243380A (ja) マスクアダプタ、マスクアダプタ付マスク及び露光方法
JP2589080Y2 (ja) 加圧型の露光装置におけるフォトツール保持具
JPH051459B2 (cs)