JPS55126246A - Contact printer for mask manufacture - Google Patents

Contact printer for mask manufacture

Info

Publication number
JPS55126246A
JPS55126246A JP3219379A JP3219379A JPS55126246A JP S55126246 A JPS55126246 A JP S55126246A JP 3219379 A JP3219379 A JP 3219379A JP 3219379 A JP3219379 A JP 3219379A JP S55126246 A JPS55126246 A JP S55126246A
Authority
JP
Japan
Prior art keywords
pipe
vacuum
chamber
stop valve
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3219379A
Other languages
Japanese (ja)
Inventor
Kenji Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3219379A priority Critical patent/JPS55126246A/en
Publication of JPS55126246A publication Critical patent/JPS55126246A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To secure a mask and close contact between the mask and a wafer and to facilitate separation after transfer, by gradually raising the internal pressure between a master chamber with its pressure reduced to high vacuum and a copy chamber through a vacuum pipe of low vacuum provided outside the main body.
CONSTITUTION: A vacuum mechanism is provided outside the main body and pipe 51 is extended from vacuum pump 50 as a vacuum source through stop valve 57 consisting of a magnetic 3-way valve. Pipe 51 is connected with suction pipe 22 of main chamber C2, and the vacuum pressure in pipe 51 is, when stop valve 58 provided with pipe 53 is opened, connected with master chamber C3 and copy chamber C1 through pipe 53 and pipes 54, 56. On the other hand, pipe 52 is installed between pipes 51 and 54, stop valve 59 and needle valve 62 are arranged in series on pipe 52, pipe 54 is connected through stop valve 60 with pipe 55, and further connected to the open air through needle valve 61. Such vacuum piping permits mask manufacture efficiency and product yield to be enhanced.
COPYRIGHT: (C)1980,JPO&Japio
JP3219379A 1979-03-22 1979-03-22 Contact printer for mask manufacture Pending JPS55126246A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3219379A JPS55126246A (en) 1979-03-22 1979-03-22 Contact printer for mask manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3219379A JPS55126246A (en) 1979-03-22 1979-03-22 Contact printer for mask manufacture

Publications (1)

Publication Number Publication Date
JPS55126246A true JPS55126246A (en) 1980-09-29

Family

ID=12352059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3219379A Pending JPS55126246A (en) 1979-03-22 1979-03-22 Contact printer for mask manufacture

Country Status (1)

Country Link
JP (1) JPS55126246A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140119A (en) * 1982-02-16 1983-08-19 Fujitsu Ltd Contact exposure device
JPS5996730A (en) * 1982-11-26 1984-06-04 Hitachi Ltd Mark aligner
JPH0197330U (en) * 1987-11-09 1989-06-28
JP2007252642A (en) * 2006-03-23 2007-10-04 Toshiba Corp Suction port body for vacuum cleaner and vacuum cleaner
US8745818B2 (en) 2010-01-08 2014-06-10 Dyson Technology Limited Cleaner head
US9066640B2 (en) 2010-01-08 2015-06-30 Dyson Technology Limited Cleaner head
US10292556B2 (en) 2013-07-31 2019-05-21 Dyson Technology Limited Cleaner head for a vacuum cleaner

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140119A (en) * 1982-02-16 1983-08-19 Fujitsu Ltd Contact exposure device
JPS5996730A (en) * 1982-11-26 1984-06-04 Hitachi Ltd Mark aligner
JPH0197330U (en) * 1987-11-09 1989-06-28
JP2007252642A (en) * 2006-03-23 2007-10-04 Toshiba Corp Suction port body for vacuum cleaner and vacuum cleaner
US8745818B2 (en) 2010-01-08 2014-06-10 Dyson Technology Limited Cleaner head
US9066640B2 (en) 2010-01-08 2015-06-30 Dyson Technology Limited Cleaner head
US10667661B2 (en) 2010-01-08 2020-06-02 Dyson Technology Limited Cleaner head
US10292556B2 (en) 2013-07-31 2019-05-21 Dyson Technology Limited Cleaner head for a vacuum cleaner
US10786127B2 (en) 2013-07-31 2020-09-29 Dyson Technology Limited Cleaner head for a vacuum cleaner

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