JPH0640589Y2 - 真空蒸着装置 - Google Patents
真空蒸着装置Info
- Publication number
- JPH0640589Y2 JPH0640589Y2 JP1987178634U JP17863487U JPH0640589Y2 JP H0640589 Y2 JPH0640589 Y2 JP H0640589Y2 JP 1987178634 U JP1987178634 U JP 1987178634U JP 17863487 U JP17863487 U JP 17863487U JP H0640589 Y2 JPH0640589 Y2 JP H0640589Y2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- partition wall
- pressure
- packing
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Sealing Devices (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178634U JPH0640589Y2 (ja) | 1987-11-24 | 1987-11-24 | 真空蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178634U JPH0640589Y2 (ja) | 1987-11-24 | 1987-11-24 | 真空蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0182376U JPH0182376U (enrdf_load_stackoverflow) | 1989-06-01 |
| JPH0640589Y2 true JPH0640589Y2 (ja) | 1994-10-26 |
Family
ID=31470243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987178634U Expired - Lifetime JPH0640589Y2 (ja) | 1987-11-24 | 1987-11-24 | 真空蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0640589Y2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0798992B2 (ja) * | 1990-06-11 | 1995-10-25 | 株式会社シンクロン | 真空槽内における基板の固定および解除方法 |
| JP2000133693A (ja) * | 1998-08-19 | 2000-05-12 | Shibaura Mechatronics Corp | 真空装置用駆動機構および真空装置 |
| JP2010018828A (ja) * | 2008-07-09 | 2010-01-28 | Asahi Kasei E-Materials Corp | 真空蒸着装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60191435A (ja) * | 1984-03-10 | 1985-09-28 | Hitachi Maxell Ltd | 磁気記録媒体製造装置 |
| JPS6330959Y2 (enrdf_load_stackoverflow) * | 1985-07-30 | 1988-08-18 | ||
| JPH0220211Y2 (enrdf_load_stackoverflow) * | 1985-09-19 | 1990-06-01 |
-
1987
- 1987-11-24 JP JP1987178634U patent/JPH0640589Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0182376U (enrdf_load_stackoverflow) | 1989-06-01 |
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