JPH0640589Y2 - 真空蒸着装置 - Google Patents

真空蒸着装置

Info

Publication number
JPH0640589Y2
JPH0640589Y2 JP1987178634U JP17863487U JPH0640589Y2 JP H0640589 Y2 JPH0640589 Y2 JP H0640589Y2 JP 1987178634 U JP1987178634 U JP 1987178634U JP 17863487 U JP17863487 U JP 17863487U JP H0640589 Y2 JPH0640589 Y2 JP H0640589Y2
Authority
JP
Japan
Prior art keywords
chamber
partition wall
pressure
packing
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987178634U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0182376U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
雅洋 山路
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Inc filed Critical Toppan Inc
Priority to JP1987178634U priority Critical patent/JPH0640589Y2/ja
Publication of JPH0182376U publication Critical patent/JPH0182376U/ja
Application granted granted Critical
Publication of JPH0640589Y2 publication Critical patent/JPH0640589Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Sealing Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP1987178634U 1987-11-24 1987-11-24 真空蒸着装置 Expired - Lifetime JPH0640589Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987178634U JPH0640589Y2 (ja) 1987-11-24 1987-11-24 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987178634U JPH0640589Y2 (ja) 1987-11-24 1987-11-24 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPH0182376U JPH0182376U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-06-01
JPH0640589Y2 true JPH0640589Y2 (ja) 1994-10-26

Family

ID=31470243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987178634U Expired - Lifetime JPH0640589Y2 (ja) 1987-11-24 1987-11-24 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPH0640589Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0798992B2 (ja) * 1990-06-11 1995-10-25 株式会社シンクロン 真空槽内における基板の固定および解除方法
JP2000133693A (ja) * 1998-08-19 2000-05-12 Shibaura Mechatronics Corp 真空装置用駆動機構および真空装置
JP2010018828A (ja) * 2008-07-09 2010-01-28 Asahi Kasei E-Materials Corp 真空蒸着装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60191435A (ja) * 1984-03-10 1985-09-28 Hitachi Maxell Ltd 磁気記録媒体製造装置
JPS6330959Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-07-30 1988-08-18
JPH0220211Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-09-19 1990-06-01

Also Published As

Publication number Publication date
JPH0182376U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-06-01

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