MY114339A - Method of making a piezoeletric element - Google Patents
Method of making a piezoeletric elementInfo
- Publication number
- MY114339A MY114339A MYPI97001405A MYPI19971405A MY114339A MY 114339 A MY114339 A MY 114339A MY PI97001405 A MYPI97001405 A MY PI97001405A MY PI19971405 A MYPI19971405 A MY PI19971405A MY 114339 A MY114339 A MY 114339A
- Authority
- MY
- Malaysia
- Prior art keywords
- element piece
- gas
- gas discharge
- active species
- excited active
- Prior art date
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
A PIEZOELECTRIC RESONATOR (2) IS PROVIDED WHICH IS FORMED OF AN ELEMENT PIECE (2). THIS ELEMENT PIECE (2) FURTHER INCLUDES A PIEZOELECTRIC MATERIAL AND AN ELECTRODE FORMED ON THE SURFACE OF THE PIEZOELECTRIC MATERIAL. A PLUG (3) FOR MOUNTING THE ELEMENT PIECE (2) AND A CASE (4) FOR HOUSING SAID ELEMENT PIECE (2) IN AN AIR-TIGHT MANNER ARE ALSO PROVIDED. THE SURFACE OF THE ELEMENT PIECE (2) IS COATED WITH A RESIN FILM (9) FORMED FROM AN EXCITED ACTIVE SPECIES OF AN ORGANIC COMPOUND GENERATED THROUGH A GAS DISCHARGE IN A PREDETERMINED DISCHARGE GAS AT APPROXIMATELY ATMOSPHERIC PRESSURE. A METHOD OF MANUFACTURING A PIEZOELECTRIC RESONATOR (2) IS ALSO PROVIDED, WHICH COMPRISES THE STEPS OF FIRST MOUNTING THE ELEMENT PIECE (2) ON THE PLUG. NEXT, A GAS DISCHARGE IN A PREDETERMINED DISCHARGE GAS IS PRODUCED AT APPROXIMATELY ATMOSPHERIC PRESSURE AND AN EXCITED ACTIVE SPECIES OF AN ORGANIC COMPOUND WHICH IS A LIQUID OR A GAS AT ROOM TEMPERATURE IS GENERATED AS A RESULT OF THIS GAS DISCHARGE IN A GAS DISCHARGE REGION. NEXT, THE SURFACE OF THE ELEMENT PIECE (2) IS EXPOSED TO THE EXCITED ACTIVE SPECIES AND A RESIN FILM (9) COVERING THE SURFACE OF THE ELEMENT PIECE (9) IS FORMED.FIGURE 1
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10200196 | 1996-04-02 | ||
JP9015976A JPH09326668A (en) | 1996-04-02 | 1997-01-14 | Piezoelectric element and production of the same |
Publications (1)
Publication Number | Publication Date |
---|---|
MY114339A true MY114339A (en) | 2002-09-30 |
Family
ID=26352213
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI97001405A MY114339A (en) | 1996-04-02 | 1997-04-01 | Method of making a piezoeletric element |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPH09326668A (en) |
CN (1) | CN1081835C (en) |
MY (1) | MY114339A (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6661162B1 (en) | 1998-07-24 | 2003-12-09 | Seiko Epson Corporation | Piezoelectric resonator and method of producing the same |
JP2002111437A (en) * | 2000-09-29 | 2002-04-12 | Daishinku Corp | Quartz piece and quartz oscillator |
JP4852850B2 (en) | 2005-02-03 | 2012-01-11 | セイコーエプソン株式会社 | Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, frequency stabilization method, and piezoelectric vibrator manufacturing method |
JP4845478B2 (en) * | 2005-10-24 | 2011-12-28 | セイコーインスツル株式会社 | Piezoelectric vibrator, method for manufacturing piezoelectric vibrator, oscillator, electronic device, and radio timepiece |
WO2008062639A1 (en) * | 2006-11-24 | 2008-05-29 | Murata Manufacturing Co., Ltd. | Elastic boundary wave device manufacturing method, and elastic boundary wave device |
JP2011030095A (en) * | 2009-07-28 | 2011-02-10 | Seiko Instruments Inc | Piezoelectric vibrator, method for manufacturing piezoelectric vibrator, oscillator, electronic equipment, and radio wave clock |
JP4992987B2 (en) * | 2010-01-29 | 2012-08-08 | セイコーエプソン株式会社 | Method for manufacturing piezoelectric vibrator and method for stabilizing frequency of piezoelectric vibrator |
JP5223955B2 (en) * | 2011-09-05 | 2013-06-26 | セイコーエプソン株式会社 | Method for stabilizing frequency of vibration element and method for manufacturing vibrator |
JP2013197857A (en) | 2012-03-19 | 2013-09-30 | Seiko Instruments Inc | Piezoelectric vibration piece, piezoelectric vibrator, oscillator, electronic apparatus, and wave clock |
JP6078694B2 (en) * | 2014-05-26 | 2017-02-08 | 株式会社アルバック | Film forming apparatus, organic film thickness measuring method, and organic film thickness sensor |
WO2016026101A1 (en) * | 2014-08-20 | 2016-02-25 | Yuyang Feng | Tuning fork with relaxor ferroelectric and composite |
JP2016139899A (en) * | 2015-01-27 | 2016-08-04 | 京セラクリスタルデバイス株式会社 | Crystal device and manufacturing method of the same |
KR102123170B1 (en) * | 2015-12-25 | 2020-06-26 | 미쯔이가가꾸가부시끼가이샤 | Piezoelectric substrate, piezoelectric fabric, piezoelectric knitted fabric, piezoelectric device, force sensor, actuator and biometric information acquisition device |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69304443T2 (en) * | 1992-06-24 | 1997-04-03 | Algra Holding Ag | Method of manufacturing a piezoelectric pressure sensitive key or keyboard, and product obtained by this method |
JP3222220B2 (en) * | 1992-10-19 | 2001-10-22 | 株式会社村田製作所 | Manufacturing method of chip type piezoelectric resonator |
-
1997
- 1997-01-14 JP JP9015976A patent/JPH09326668A/en active Pending
- 1997-04-01 MY MYPI97001405A patent/MY114339A/en unknown
- 1997-04-01 CN CN97111691A patent/CN1081835C/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CN1165432A (en) | 1997-11-19 |
JPH09326668A (en) | 1997-12-16 |
CN1081835C (en) | 2002-03-27 |
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