MY114339A - Method of making a piezoeletric element - Google Patents

Method of making a piezoeletric element

Info

Publication number
MY114339A
MY114339A MYPI97001405A MYPI19971405A MY114339A MY 114339 A MY114339 A MY 114339A MY PI97001405 A MYPI97001405 A MY PI97001405A MY PI19971405 A MYPI19971405 A MY PI19971405A MY 114339 A MY114339 A MY 114339A
Authority
MY
Malaysia
Prior art keywords
element piece
gas
gas discharge
active species
excited active
Prior art date
Application number
MYPI97001405A
Inventor
Ikegami Yasumitsu
Miyakawa Takuya
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of MY114339A publication Critical patent/MY114339A/en

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

A PIEZOELECTRIC RESONATOR (2) IS PROVIDED WHICH IS FORMED OF AN ELEMENT PIECE (2). THIS ELEMENT PIECE (2) FURTHER INCLUDES A PIEZOELECTRIC MATERIAL AND AN ELECTRODE FORMED ON THE SURFACE OF THE PIEZOELECTRIC MATERIAL. A PLUG (3) FOR MOUNTING THE ELEMENT PIECE (2) AND A CASE (4) FOR HOUSING SAID ELEMENT PIECE (2) IN AN AIR-TIGHT MANNER ARE ALSO PROVIDED. THE SURFACE OF THE ELEMENT PIECE (2) IS COATED WITH A RESIN FILM (9) FORMED FROM AN EXCITED ACTIVE SPECIES OF AN ORGANIC COMPOUND GENERATED THROUGH A GAS DISCHARGE IN A PREDETERMINED DISCHARGE GAS AT APPROXIMATELY ATMOSPHERIC PRESSURE. A METHOD OF MANUFACTURING A PIEZOELECTRIC RESONATOR (2) IS ALSO PROVIDED, WHICH COMPRISES THE STEPS OF FIRST MOUNTING THE ELEMENT PIECE (2) ON THE PLUG. NEXT, A GAS DISCHARGE IN A PREDETERMINED DISCHARGE GAS IS PRODUCED AT APPROXIMATELY ATMOSPHERIC PRESSURE AND AN EXCITED ACTIVE SPECIES OF AN ORGANIC COMPOUND WHICH IS A LIQUID OR A GAS AT ROOM TEMPERATURE IS GENERATED AS A RESULT OF THIS GAS DISCHARGE IN A GAS DISCHARGE REGION. NEXT, THE SURFACE OF THE ELEMENT PIECE (2) IS EXPOSED TO THE EXCITED ACTIVE SPECIES AND A RESIN FILM (9) COVERING THE SURFACE OF THE ELEMENT PIECE (9) IS FORMED.FIGURE 1
MYPI97001405A 1996-04-02 1997-04-01 Method of making a piezoeletric element MY114339A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10200196 1996-04-02
JP9015976A JPH09326668A (en) 1996-04-02 1997-01-14 Piezoelectric element and production of the same

Publications (1)

Publication Number Publication Date
MY114339A true MY114339A (en) 2002-09-30

Family

ID=26352213

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI97001405A MY114339A (en) 1996-04-02 1997-04-01 Method of making a piezoeletric element

Country Status (3)

Country Link
JP (1) JPH09326668A (en)
CN (1) CN1081835C (en)
MY (1) MY114339A (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6661162B1 (en) 1998-07-24 2003-12-09 Seiko Epson Corporation Piezoelectric resonator and method of producing the same
JP2002111437A (en) * 2000-09-29 2002-04-12 Daishinku Corp Quartz piece and quartz oscillator
JP4852850B2 (en) 2005-02-03 2012-01-11 セイコーエプソン株式会社 Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, frequency stabilization method, and piezoelectric vibrator manufacturing method
JP4845478B2 (en) * 2005-10-24 2011-12-28 セイコーインスツル株式会社 Piezoelectric vibrator, method for manufacturing piezoelectric vibrator, oscillator, electronic device, and radio timepiece
WO2008062639A1 (en) * 2006-11-24 2008-05-29 Murata Manufacturing Co., Ltd. Elastic boundary wave device manufacturing method, and elastic boundary wave device
JP2011030095A (en) * 2009-07-28 2011-02-10 Seiko Instruments Inc Piezoelectric vibrator, method for manufacturing piezoelectric vibrator, oscillator, electronic equipment, and radio wave clock
JP4992987B2 (en) * 2010-01-29 2012-08-08 セイコーエプソン株式会社 Method for manufacturing piezoelectric vibrator and method for stabilizing frequency of piezoelectric vibrator
JP5223955B2 (en) * 2011-09-05 2013-06-26 セイコーエプソン株式会社 Method for stabilizing frequency of vibration element and method for manufacturing vibrator
JP2013197857A (en) 2012-03-19 2013-09-30 Seiko Instruments Inc Piezoelectric vibration piece, piezoelectric vibrator, oscillator, electronic apparatus, and wave clock
JP6078694B2 (en) * 2014-05-26 2017-02-08 株式会社アルバック Film forming apparatus, organic film thickness measuring method, and organic film thickness sensor
WO2016026101A1 (en) * 2014-08-20 2016-02-25 Yuyang Feng Tuning fork with relaxor ferroelectric and composite
JP2016139899A (en) * 2015-01-27 2016-08-04 京セラクリスタルデバイス株式会社 Crystal device and manufacturing method of the same
KR102123170B1 (en) * 2015-12-25 2020-06-26 미쯔이가가꾸가부시끼가이샤 Piezoelectric substrate, piezoelectric fabric, piezoelectric knitted fabric, piezoelectric device, force sensor, actuator and biometric information acquisition device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69304443T2 (en) * 1992-06-24 1997-04-03 Algra Holding Ag Method of manufacturing a piezoelectric pressure sensitive key or keyboard, and product obtained by this method
JP3222220B2 (en) * 1992-10-19 2001-10-22 株式会社村田製作所 Manufacturing method of chip type piezoelectric resonator

Also Published As

Publication number Publication date
CN1165432A (en) 1997-11-19
JPH09326668A (en) 1997-12-16
CN1081835C (en) 2002-03-27

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