JPH0182376U - - Google Patents

Info

Publication number
JPH0182376U
JPH0182376U JP1987178634U JP17863487U JPH0182376U JP H0182376 U JPH0182376 U JP H0182376U JP 1987178634 U JP1987178634 U JP 1987178634U JP 17863487 U JP17863487 U JP 17863487U JP H0182376 U JPH0182376 U JP H0182376U
Authority
JP
Japan
Prior art keywords
pressure
self
sealed
under reduced
during use
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987178634U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0640589Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987178634U priority Critical patent/JPH0640589Y2/ja
Publication of JPH0182376U publication Critical patent/JPH0182376U/ja
Application granted granted Critical
Publication of JPH0640589Y2 publication Critical patent/JPH0640589Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Sealing Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP1987178634U 1987-11-24 1987-11-24 真空蒸着装置 Expired - Lifetime JPH0640589Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987178634U JPH0640589Y2 (ja) 1987-11-24 1987-11-24 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987178634U JPH0640589Y2 (ja) 1987-11-24 1987-11-24 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPH0182376U true JPH0182376U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-06-01
JPH0640589Y2 JPH0640589Y2 (ja) 1994-10-26

Family

ID=31470243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987178634U Expired - Lifetime JPH0640589Y2 (ja) 1987-11-24 1987-11-24 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPH0640589Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0445270A (ja) * 1990-06-11 1992-02-14 Shinku Kikai Kogyo Kk 真空槽内における駆動方法
WO2000011237A1 (fr) * 1998-08-19 2000-03-02 Shibaura Mechatronics Corporation Dispositif a depression et mecanisme d'entrainement a cet effet
JP2010018828A (ja) * 2008-07-09 2010-01-28 Asahi Kasei E-Materials Corp 真空蒸着装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60191435A (ja) * 1984-03-10 1985-09-28 Hitachi Maxell Ltd 磁気記録媒体製造装置
JPS6225798U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-07-30 1987-02-17
JPS6251172U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-09-19 1987-03-30

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60191435A (ja) * 1984-03-10 1985-09-28 Hitachi Maxell Ltd 磁気記録媒体製造装置
JPS6225798U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-07-30 1987-02-17
JPS6251172U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-09-19 1987-03-30

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0445270A (ja) * 1990-06-11 1992-02-14 Shinku Kikai Kogyo Kk 真空槽内における駆動方法
WO2000011237A1 (fr) * 1998-08-19 2000-03-02 Shibaura Mechatronics Corporation Dispositif a depression et mecanisme d'entrainement a cet effet
JP2010018828A (ja) * 2008-07-09 2010-01-28 Asahi Kasei E-Materials Corp 真空蒸着装置

Also Published As

Publication number Publication date
JPH0640589Y2 (ja) 1994-10-26

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