JPS6251172U - - Google Patents

Info

Publication number
JPS6251172U
JPS6251172U JP14205685U JP14205685U JPS6251172U JP S6251172 U JPS6251172 U JP S6251172U JP 14205685 U JP14205685 U JP 14205685U JP 14205685 U JP14205685 U JP 14205685U JP S6251172 U JPS6251172 U JP S6251172U
Authority
JP
Japan
Prior art keywords
film unwinding
chamber
film
section
roll coater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14205685U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0220211Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985142056U priority Critical patent/JPH0220211Y2/ja
Publication of JPS6251172U publication Critical patent/JPS6251172U/ja
Application granted granted Critical
Publication of JPH0220211Y2 publication Critical patent/JPH0220211Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1985142056U 1985-09-19 1985-09-19 Expired JPH0220211Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985142056U JPH0220211Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-09-19 1985-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985142056U JPH0220211Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-09-19 1985-09-19

Publications (2)

Publication Number Publication Date
JPS6251172U true JPS6251172U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-03-30
JPH0220211Y2 JPH0220211Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-06-01

Family

ID=31050422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985142056U Expired JPH0220211Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-09-19 1985-09-19

Country Status (1)

Country Link
JP (1) JPH0220211Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0182376U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-11-24 1989-06-01
JP2010018828A (ja) * 2008-07-09 2010-01-28 Asahi Kasei E-Materials Corp 真空蒸着装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59173267A (ja) * 1983-03-23 1984-10-01 Fuji Photo Film Co Ltd 薄膜形成装置
JPS59173266A (ja) * 1983-03-23 1984-10-01 Fuji Photo Film Co Ltd 薄膜形成装置
JPS6067671A (ja) * 1983-09-24 1985-04-18 Anelva Corp 薄膜作成装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59173267A (ja) * 1983-03-23 1984-10-01 Fuji Photo Film Co Ltd 薄膜形成装置
JPS59173266A (ja) * 1983-03-23 1984-10-01 Fuji Photo Film Co Ltd 薄膜形成装置
JPS6067671A (ja) * 1983-09-24 1985-04-18 Anelva Corp 薄膜作成装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0182376U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-11-24 1989-06-01
JP2010018828A (ja) * 2008-07-09 2010-01-28 Asahi Kasei E-Materials Corp 真空蒸着装置

Also Published As

Publication number Publication date
JPH0220211Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-06-01

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