JPH0632682Y2 - ボンディング装置の基板固定用受台 - Google Patents

ボンディング装置の基板固定用受台

Info

Publication number
JPH0632682Y2
JPH0632682Y2 JP1987074560U JP7456087U JPH0632682Y2 JP H0632682 Y2 JPH0632682 Y2 JP H0632682Y2 JP 1987074560 U JP1987074560 U JP 1987074560U JP 7456087 U JP7456087 U JP 7456087U JP H0632682 Y2 JPH0632682 Y2 JP H0632682Y2
Authority
JP
Japan
Prior art keywords
substrate
pedestal
curved
fixing
bonding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987074560U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63182530U (enExample
Inventor
秀明 三好
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kaijo Corp
Original Assignee
Kaijo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kaijo Corp filed Critical Kaijo Corp
Priority to JP1987074560U priority Critical patent/JPH0632682Y2/ja
Publication of JPS63182530U publication Critical patent/JPS63182530U/ja
Application granted granted Critical
Publication of JPH0632682Y2 publication Critical patent/JPH0632682Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H10W72/0711—
    • H10W72/07178—

Landscapes

  • Wire Bonding (AREA)
  • Die Bonding (AREA)
JP1987074560U 1987-05-19 1987-05-19 ボンディング装置の基板固定用受台 Expired - Lifetime JPH0632682Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987074560U JPH0632682Y2 (ja) 1987-05-19 1987-05-19 ボンディング装置の基板固定用受台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987074560U JPH0632682Y2 (ja) 1987-05-19 1987-05-19 ボンディング装置の基板固定用受台

Publications (2)

Publication Number Publication Date
JPS63182530U JPS63182530U (enExample) 1988-11-24
JPH0632682Y2 true JPH0632682Y2 (ja) 1994-08-24

Family

ID=30919880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987074560U Expired - Lifetime JPH0632682Y2 (ja) 1987-05-19 1987-05-19 ボンディング装置の基板固定用受台

Country Status (1)

Country Link
JP (1) JPH0632682Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4712469B2 (ja) * 2005-07-27 2011-06-29 株式会社日立ハイテクインスツルメンツ スクリーン印刷機

Also Published As

Publication number Publication date
JPS63182530U (enExample) 1988-11-24

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