JPH0632566Y2 - 光学式変位検出器 - Google Patents

光学式変位検出器

Info

Publication number
JPH0632566Y2
JPH0632566Y2 JP1989070393U JP7039389U JPH0632566Y2 JP H0632566 Y2 JPH0632566 Y2 JP H0632566Y2 JP 1989070393 U JP1989070393 U JP 1989070393U JP 7039389 U JP7039389 U JP 7039389U JP H0632566 Y2 JPH0632566 Y2 JP H0632566Y2
Authority
JP
Japan
Prior art keywords
scale
scale member
mounting member
displacement detector
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1989070393U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0310206U (enExample
Inventor
久雄 久保田
直義 寺尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP1989070393U priority Critical patent/JPH0632566Y2/ja
Publication of JPH0310206U publication Critical patent/JPH0310206U/ja
Application granted granted Critical
Publication of JPH0632566Y2 publication Critical patent/JPH0632566Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP1989070393U 1989-06-16 1989-06-16 光学式変位検出器 Expired - Fee Related JPH0632566Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989070393U JPH0632566Y2 (ja) 1989-06-16 1989-06-16 光学式変位検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989070393U JPH0632566Y2 (ja) 1989-06-16 1989-06-16 光学式変位検出器

Publications (2)

Publication Number Publication Date
JPH0310206U JPH0310206U (enExample) 1991-01-31
JPH0632566Y2 true JPH0632566Y2 (ja) 1994-08-24

Family

ID=31606514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989070393U Expired - Fee Related JPH0632566Y2 (ja) 1989-06-16 1989-06-16 光学式変位検出器

Country Status (1)

Country Link
JP (1) JPH0632566Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5108289B2 (ja) * 2005-12-06 2012-12-26 株式会社ミツトヨ 変位測定装置用スケール

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3316081A1 (de) * 1983-05-03 1984-11-08 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Messeinrichtung
JPS61105803U (enExample) * 1984-12-18 1986-07-05
JPS61206811A (ja) * 1985-03-06 1986-09-13 株式会社ミツトヨ 機械要素の連結構造
DD249615A3 (de) * 1985-05-02 1987-09-16 Zeiss Jena Veb Carl Messstabfassung fuer laengenmesssysteme

Also Published As

Publication number Publication date
JPH0310206U (enExample) 1991-01-31

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees