JPH0617036Y2 - ターボ分子ポンプ - Google Patents

ターボ分子ポンプ

Info

Publication number
JPH0617036Y2
JPH0617036Y2 JP1988019514U JP1951488U JPH0617036Y2 JP H0617036 Y2 JPH0617036 Y2 JP H0617036Y2 JP 1988019514 U JP1988019514 U JP 1988019514U JP 1951488 U JP1951488 U JP 1951488U JP H0617036 Y2 JPH0617036 Y2 JP H0617036Y2
Authority
JP
Japan
Prior art keywords
rotor
stator
peripheral surface
spacer
casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988019514U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01124396U (en, 2012
Inventor
成田　　潔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1988019514U priority Critical patent/JPH0617036Y2/ja
Publication of JPH01124396U publication Critical patent/JPH01124396U/ja
Application granted granted Critical
Publication of JPH0617036Y2 publication Critical patent/JPH0617036Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP1988019514U 1988-02-17 1988-02-17 ターボ分子ポンプ Expired - Lifetime JPH0617036Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988019514U JPH0617036Y2 (ja) 1988-02-17 1988-02-17 ターボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988019514U JPH0617036Y2 (ja) 1988-02-17 1988-02-17 ターボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPH01124396U JPH01124396U (en, 2012) 1989-08-24
JPH0617036Y2 true JPH0617036Y2 (ja) 1994-05-02

Family

ID=31235090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988019514U Expired - Lifetime JPH0617036Y2 (ja) 1988-02-17 1988-02-17 ターボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPH0617036Y2 (en, 2012)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5358810A (en) * 1976-11-08 1978-05-27 Aisin Seiki Co Ltd High vacuum pump
EP0129709A3 (en) * 1983-04-26 1985-03-06 Anelva Corporation Combinational molecular pump capable of readily being cleaned
JPS60204997A (ja) * 1984-03-28 1985-10-16 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
JPS61145394A (ja) * 1984-12-18 1986-07-03 Tokuda Seisakusho Ltd 分子ポンプ
JPS60243395A (ja) * 1985-04-30 1985-12-03 Shimadzu Corp ターボ分子ポンプ
NL8602052A (nl) * 1986-08-12 1988-03-01 Ultra Centrifuge Nederland Nv Hoogvacuumpomp.

Also Published As

Publication number Publication date
JPH01124396U (en, 2012) 1989-08-24

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