JPH0613258Y2 - 気相成長装置のサセプタ回転位置検出装置 - Google Patents

気相成長装置のサセプタ回転位置検出装置

Info

Publication number
JPH0613258Y2
JPH0613258Y2 JP1986083737U JP8373786U JPH0613258Y2 JP H0613258 Y2 JPH0613258 Y2 JP H0613258Y2 JP 1986083737 U JP1986083737 U JP 1986083737U JP 8373786 U JP8373786 U JP 8373786U JP H0613258 Y2 JPH0613258 Y2 JP H0613258Y2
Authority
JP
Japan
Prior art keywords
susceptor
index
light
vapor phase
phase growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986083737U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62194759U (enExample
Inventor
英男 古嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP1986083737U priority Critical patent/JPH0613258Y2/ja
Publication of JPS62194759U publication Critical patent/JPS62194759U/ja
Application granted granted Critical
Publication of JPH0613258Y2 publication Critical patent/JPH0613258Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1986083737U 1986-06-02 1986-06-02 気相成長装置のサセプタ回転位置検出装置 Expired - Lifetime JPH0613258Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986083737U JPH0613258Y2 (ja) 1986-06-02 1986-06-02 気相成長装置のサセプタ回転位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986083737U JPH0613258Y2 (ja) 1986-06-02 1986-06-02 気相成長装置のサセプタ回転位置検出装置

Publications (2)

Publication Number Publication Date
JPS62194759U JPS62194759U (enExample) 1987-12-11
JPH0613258Y2 true JPH0613258Y2 (ja) 1994-04-06

Family

ID=30937594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986083737U Expired - Lifetime JPH0613258Y2 (ja) 1986-06-02 1986-06-02 気相成長装置のサセプタ回転位置検出装置

Country Status (1)

Country Link
JP (1) JPH0613258Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56111419A (en) * 1980-02-08 1981-09-03 Toshiba Corp Optical position detector

Also Published As

Publication number Publication date
JPS62194759U (enExample) 1987-12-11

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