JPH0610688Y2 - ウエハ搬送装置 - Google Patents

ウエハ搬送装置

Info

Publication number
JPH0610688Y2
JPH0610688Y2 JP6970987U JP6970987U JPH0610688Y2 JP H0610688 Y2 JPH0610688 Y2 JP H0610688Y2 JP 6970987 U JP6970987 U JP 6970987U JP 6970987 U JP6970987 U JP 6970987U JP H0610688 Y2 JPH0610688 Y2 JP H0610688Y2
Authority
JP
Japan
Prior art keywords
wafer
side wall
temporary storage
storage means
link
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6970987U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63195733U (enrdf_load_stackoverflow
Inventor
一男 島根
辰郎 川畑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6970987U priority Critical patent/JPH0610688Y2/ja
Publication of JPS63195733U publication Critical patent/JPS63195733U/ja
Application granted granted Critical
Publication of JPH0610688Y2 publication Critical patent/JPH0610688Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Pile Receivers (AREA)
JP6970987U 1987-05-12 1987-05-12 ウエハ搬送装置 Expired - Lifetime JPH0610688Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6970987U JPH0610688Y2 (ja) 1987-05-12 1987-05-12 ウエハ搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6970987U JPH0610688Y2 (ja) 1987-05-12 1987-05-12 ウエハ搬送装置

Publications (2)

Publication Number Publication Date
JPS63195733U JPS63195733U (enrdf_load_stackoverflow) 1988-12-16
JPH0610688Y2 true JPH0610688Y2 (ja) 1994-03-16

Family

ID=30910691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6970987U Expired - Lifetime JPH0610688Y2 (ja) 1987-05-12 1987-05-12 ウエハ搬送装置

Country Status (1)

Country Link
JP (1) JPH0610688Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3922852B2 (ja) * 1999-11-16 2007-05-30 東京エレクトロン株式会社 基板処理装置および基板処理方法

Also Published As

Publication number Publication date
JPS63195733U (enrdf_load_stackoverflow) 1988-12-16

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