JPS63195733U - - Google Patents

Info

Publication number
JPS63195733U
JPS63195733U JP6970987U JP6970987U JPS63195733U JP S63195733 U JPS63195733 U JP S63195733U JP 6970987 U JP6970987 U JP 6970987U JP 6970987 U JP6970987 U JP 6970987U JP S63195733 U JPS63195733 U JP S63195733U
Authority
JP
Japan
Prior art keywords
link
sensor
wafer
side wall
storage means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6970987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0610688Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6970987U priority Critical patent/JPH0610688Y2/ja
Publication of JPS63195733U publication Critical patent/JPS63195733U/ja
Application granted granted Critical
Publication of JPH0610688Y2 publication Critical patent/JPH0610688Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Pile Receivers (AREA)
JP6970987U 1987-05-12 1987-05-12 ウエハ搬送装置 Expired - Lifetime JPH0610688Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6970987U JPH0610688Y2 (ja) 1987-05-12 1987-05-12 ウエハ搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6970987U JPH0610688Y2 (ja) 1987-05-12 1987-05-12 ウエハ搬送装置

Publications (2)

Publication Number Publication Date
JPS63195733U true JPS63195733U (enrdf_load_stackoverflow) 1988-12-16
JPH0610688Y2 JPH0610688Y2 (ja) 1994-03-16

Family

ID=30910691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6970987U Expired - Lifetime JPH0610688Y2 (ja) 1987-05-12 1987-05-12 ウエハ搬送装置

Country Status (1)

Country Link
JP (1) JPH0610688Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001144038A (ja) * 1999-11-16 2001-05-25 Tokyo Electron Ltd 基板処理装置および基板処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001144038A (ja) * 1999-11-16 2001-05-25 Tokyo Electron Ltd 基板処理装置および基板処理方法

Also Published As

Publication number Publication date
JPH0610688Y2 (ja) 1994-03-16

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